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Tegal Receives Orders from MEMS Device Manufacturers in Europe and Taiwan; Follow-on Order for Capacity Expansion and for MEMS Start-up.

PETALUMA, Calif. -- Tegal Corporation (Nasdaq:TGAL) today announced two orders for its 900 series plasma etch systems from MEMS device manufacturers in Europe and Taiwan. The European order came from a leading supplier of MEMS devices to the automotive industry, and is a follow-on order to add capacity in high-volume MEMS fabrication. The Taiwan order came from a start-up MEMS device foundry.

"Tegal produces a wide range of reliable etch tools ideal for low cost production of MEMS sensor and other nanotechnology devices used across the global automotive, computer and biotechnology industries," said Mike Parodi, Tegal's chairman, president and CEO. "The 900 series provides an ideal platform for reliable and cost effective etch processing."

Popular applications for the Tegal 900 series plasma etch systems include silicon nitride and oxide dielectric etch in addition to a wide variety of polymer etch treatments. Many of today's MEMS and nano-structure devices require simple, high-throughput plasma processes uniquely served by the 900 and 980 series plasma etch systems.

Safe Harbor Statement

The statements in this news release are forward-looking statements that involve a number of risks and uncertainties. As discussed in Tegal's annual report on Form 10-K for the fiscal year ended March 31, 2004, assumptions relating to the foregoing involve judgments with respect to, among other things, the ability of Tegal to successfully implement its business strategy; future economic, competitive and market conditions, including those in Europe and Asia and those related to Tegal's strategic markets; whether the products offered by Tegal will continue to achieve customer acceptance, and future business decisions, all of which are difficult or impossible to predict accurately and many of which are beyond the control of Tegal. Although Tegal believes that the assumptions underlying the forward-looking statements are reasonable, any of the assumptions could prove inaccurate and, therefore, there can be no assurance that the results contemplated in the forward-looking statements will be realized. In light of the significant uncertainties inherent in the forward-looking information included herein, the inclusion of such information should not be regarded as a representation by Tegal or any other person that Tegal's objectives or plans will be realized. Tegal undertakes no obligation to revise the forward-looking statements contained herein to reflect such events or circumstances after the date hereof or to reflect the occurrence of unanticipated events.

About Tegal

Tegal provides process and equipment solutions to leading-edge suppliers of advanced semiconductor and nanotechnology devices. Incorporating unique, patented etch and deposition technologies, Tegal's system solutions are backed by over 35 years of advanced development and over 100 patents. Some examples of devices enabled by Tegal technology are energy efficient memories found in portable computers, cellphones, PDAs and RFID applications; megapixel imaging chips used in digital and cellphone cameras; power amplifiers for portable handsets and wireless networking gear; and MEMS devices like accelerometers for automotive airbags, microfluidic control devices for ink jet printers; and laboratory-on-a-chip medical test kits. More information is available on the Internet at:
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Publication:Business Wire
Date:Dec 16, 2004
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