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Tegal Receives Orders for 900 and 980ACS Series Etch Tools.

PETALUMA, Calif. -- Tegal Corporation (Nasdaq:TGAL), a leading designer and manufacturer of plasma etch and deposition systems used in the production of integrated circuits and nanotechnology devices, today announced the sale of several 900 and 980ACS plasma etch systems to four different customers in the US and Europe. The total value of these recent orders was approximately $1.5 million.

The systems covered by these orders will be used for a wide range of processes. Popular applications include silicon nitride and oxide dielectric etch in addition to a wide variety of polymer etch treatments. Many of today's MEMS and nano-structure devices require simple, high-throughput plasma processes uniquely served by the 900 and 980ACS series systems.

Tegal's 900 Series systems are widely recognized for their low cost of ownership and high throughput. The Tegal 980ACS is the latest in a long series of plasma etch systems produced by Tegal for companies around the world. More than 1,500 of the 900 Series systems have been installed worldwide and are supported by Tegal's extensive worldwide field process and service organization. 900 Series systems deliver highly reliable, repeatable results in etching a variety of films used to manufacture MEMS, silicon ICs, telecommunications and optoelectronics devices, flat panel displays and thin film magnetic heads.

Safe Harbor Statement

Except for historical information, matters discussed in this news release contain forward-looking statements within the meaning of Section 27A of the Securities Act and Section 21E of the Exchange Act. Forward-looking statements, which are based on assumptions and describe our future plans, strategies and expectations, are generally identifiable by the use of the words "anticipate," "believe," "estimate," "expect," "intend," "project" or similar expressions. These forward-looking statements are subject to risks, uncertainties and assumptions about the Company including, but not limited to industry conditions, economic conditions, acceptance of new technologies and market acceptance of the Company's products and services. All forward-looking statements attributable to us or persons acting on our behalf are expressly qualified in their entirety by the cautionary statements in this paragraph. For a further discussion of these risks and uncertainties, please refer to the Company's periodic filings with the Securities and Exchange Commission.

About Tegal

Tegal provides process and equipment solutions to leading edge suppliers of advanced semiconductor and nanotechnology devices. Incorporating unique, patented etch and deposition technologies, Tegal's system solutions are backed by over 35 years of advanced development and over 100 patents. Some examples of devices enabled by Tegal technology are energy efficient memories found in portable computers, cellphones, PDAs and RFID applications; megapixel imaging chips used in digital and cellphone cameras; power amplifiers for portable handsets and wireless networking gear; and MEMS devices like accelerometers for automotive airbags, microfluidic control devices for ink jet printers; and laboratory-on-a-chip medical test kits.

More information is available on the Internet at:
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Publication:Business Wire
Geographic Code:1USA
Date:Dec 15, 2005
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