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Soft X-Ray (SXR) light source.

The 642-1 Soft X-Ray (SXR) light source from McPherson features a six position anode carousel. Users can easily change anode target materials without breaking vacuum.

Using different anode materials allows tuning of the emitted eV energy. The vacuum housing of the source features standard NW40K vacuum flanges (optionally DN40CF). It also features two equivalent output beams. These provide ability for sample/reference comparison and device calibration.

The new source is easy to set up and provides reliable emission-line source and means for at-wavelength calibration, or metrology of SXR lithography materials, multilayers or grazing incidence optical systems for astrophysics and other fundamental research.

This electron impact light source uses a hot filament to produce electrons, that are subsequently accelerated towards a solid anode target by high voltage. The SXR and extreme UV output emission spectrum follows the target anode material valence band structure. Anodes can be readily exchanged in the carousel to produce desired wavelengths, such as Si (0.71nm), Mg (0.98nm), C (4.4nm) and many more.

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Publication:Electro Optics
Date:Aug 1, 2019
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