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SCREEN Launches Resist Coating System for Electronic Devices with 3D Structures.

Tokyo, Oct 13, 2014 - (JCN) - SCREEN Semiconductor Solutions Co., Ltd., a member of the SCREEN Holdings Group, has announced the upcoming release of its new 80EX Spray Coater. The system is a resist spray coater specially designed for electronic devices with 3D structures.

The system offers excellent coating uniformity of photoresist on MEMS substrates, which are experiencing increasing demand due to the growing functionality of, particularly, smartphones, wearable devices and medical equipment. Sales of the system are scheduled to begin in October 2014.

When using conventional spin coaters in the photoresist coating process, stepped parts are not sufficiently covered with photoresist. Achieving highly uniform coatings of such devices has become a key issue for the electronics device industry and the need has grown for a high-productivity system that can provide uniform resist coating of substrate surfaces with 3D structures.

SCREEN Semiconductor Solutions therefore developed the 80EX Spray Coater, a resist coating system designed specifically for electronic devices with 3D structures. Work on this system has been overseen by the company's Frontier Project, a program started in 2010 to progressively open up new business domains within the semiconductor manufacturing equipment field.

The system uses a spray mechanism to coat photoresist and protective layers, enabling it to achieve highly uniform coverage of stepped areas, which was extremely difficult with conventional systems. As a coater/developer, the system also incorporates a proven, high-speed transfer mechanism and multiple processing units.

These technologies provide high productivity and also enable the processing of thin wafers and coating of both top and bottom surfaces, making this spray coater a truly practical system.

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Publication:JCNN News Summaries
Date:Oct 14, 2014
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