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Rudolph's New TrueADC Software Improves Speed and Accuracy of Automatic Defect Classification; Dynamic Adaptive Defect Library Provides 'Learn-as-you-go' Incorporation of Previously Unclassified Defects.

FLANDERS, N.J. -- Rudolph Technologies, Inc. (NASDAQ:RTEC), a leading provider of process control equipment for thin film measurement and macro defect inspection as well as data analysis software solutions today announced the availability of its new TrueADC(TM) Automatic Defect Classification (ADC) system. TrueADC offers a unique Dynamic Defect Library function that facilitates expansion of the library to easily adjust for new defects or for process variation common to most production lines without specific engineering involvement. TrueADC has been in limited release at select sites for several months during which time Rudolph has received multiple repeat orders from top-tier semiconductor manufacturers.

"We are thrilled by the rapid acceptance of this new capability," said Mike Plisinski, general manager of Rudolph's Data Analysis and Review Business Unit. "We believe we now have a product that lives up to the expectations customers have held so long for ADC. We focused on the two major barriers to wide acceptance of ADC technology: performance and cost of ownership. By quadrupling the amount of information we extract from an image, as compared to current technologies, and adding unique automated recipe management capabilities, our customers are realizing better performance across a broader range of defects with minimal specialized training to maintain that performance."

The Dynamic Defect Library lets users add new defect classifications quickly and easily so that system performance continually improves. Rudolph will provide a custom pre-shipment library development based on customer-provided defect images, allowing a very short time to put the system into production. New defect data from unclassified defects can be transferred seamlessly to TrueADC from Rudolph's Harmony ASR(TM) defect review software. The robust design of the database and search functions allows virtually unlimited expansion without impact on speed and accuracy, enabling a single installation to support a large number of tools and processes throughout the fab.

"In recent evaluations, customers report that TrueADC has provided the fastest and most accurate results when compared with other current offerings," said Mayson Brooks, vice president of Global Inspection Sales at Rudolph. "Our customers are particularly impressed by the ease with which we have been able to adapt the library to their specific products and processes and keep the library performance high with little-to-no maintenance."

The Data Analysis and Review Business Unit is dedicated to advanced software solutions to enable the next level of process automation. These products can be independent fab solutions or packaged to support new and existing metrology or inspection tools. Rudolph customers can experience an increased benefit from their toolsets with the addition of new advanced analysis software. Additionally, Rudolph fab-wide packages are available to anyone who needs advanced process-centric automation and analysis software.

About Rudolph Technologies, Inc.

Rudolph Technologies is a worldwide leader in the design, development, manufacture and support of high-performance process control metrology, defect inspection and data analysis systems used by semiconductor device manufacturers. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down costs and time to market. The company has enhanced the competitiveness of its products in the marketplace by anticipating and addressing many emerging trends driving the semiconductor industry's growth. Rudolph's strategy for continued technological and market leadership includes aggressive research and development of complementary metrology and inspection solutions. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the company's web site at www.rudolphtech.com.

Safe Harbor Statement

This press release contains forward-looking statements within the meaning of the Private Securities Litigation Reform Act of 1995 (the "Act"). In some cases, you can identify those so-called "forward-looking statements" by words such as "may," "will," "would," "should," "expects," "plans," "anticipates," "believes," "feels," "estimates," "predicts," "potential," or "continue," or the negative of those words and other comparable words. Rudolph wishes to take advantage of the "safe harbor" provided for by the Act and cautions that actual results may differ materially from those projected as a result of various factors, including risks and uncertainties, many of which are beyond Rudolph's control. Factors that could cause actual results to differ materially from the expectations expressed in such forward-looking statements, include, but are not limited to, the impact of the slowdown in the overall economy, the uncertainty of the current global political environment, the potential for terrorist attacks, the potential for business disruptions due to infectious diseases, changes in customer demands for our existing and new products, the timing, cancellation or delay of customer orders and shipments, the timing of revenue recognition of shipments, new product offerings from our competitors, changes in or an inability to execute Rudolph's business strategy, unanticipated manufacturing or supply problems and changes in tax rules. Rudolph cannot guarantee future results, levels of activity, performance, or achievements. The matters discussed in this press release also involve risks and uncertainties as summarized in Rudolph's Form 10-K report for the year ended December 31, 2005 and other filings with the Securities and Exchange Commission ("SEC"), which are available at http://www.sec.gov, the SEC's website, and at http://www.rudolphtech.com, the Rudolph website. While these factors may be updated from time to time through the filing of reports and registration statements with the SEC, Rudolph does not assume any obligation to update the forward-looking information contained in this press release.
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Publication:Business Wire
Geographic Code:1USA
Date:Jun 12, 2006
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