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Olympus-ITA Wafer Loader and Manual Inspection System Handles 300mm Wafers.

SAN JOSE, Calif. -- Olympus Integrated Technologies America (Olympus-ITA), a subsidiary of Olympus Corporation of Japan and a leader in quality inspection and defect review systems, introduces the Model AL110-12 wafer loader and manual inspection system for 300mm wafers. The AL110-12 is FOUP and FOSB compatible and a superb solution for lower cost back-end inspection requirements. A Class 1 mini-environment is also available as an option. E[acute accent]Macro illumination uses both scattering and focused illumination for inspection and easy detection of film problems, scratches, and many other macro defects. A metal halide lamp and fiber optic provide bright illumination for the entire area of the 300mm wafer with a cold light. The safe and ergonomic AL110-12 can be set to a variety of inspection modes so the operator can maintain a relaxed position, even during long periods of operation. E[acute accent]The AL110-12 system has top macro, back macro, and microscope inspection. The robot arm with vacuum pick-up provides non-contact centering. The system uses Olympus' MX61 microscope for excellent resolution and precision quality optical imaging. The stage has 360 degree rotation. The system's footprint is 1285mm x 1500mm and the height of the cassette position is a standard 900mm. The new 300mm loader is an extension of Olympus' loader series for 150mm and 200mm wafers.

E[acute accent]About Olympus-Integrated Technologies of America

E[acute accent]Olympus Integrated Technologies America, Inc. (Olympus-ITA) was founded in March 2000 as a wholly owned subsidiary of Olympus Corporation, Tokyo, Japan. Specializing in semiconductor products and systems for wafer inspection and defect review, Olympus-ITA is the application software development R&D center for Olympus semiconductor products. Its location in San Jose, California, enables the company to respond quickly to provide sales, service, and support to semiconductor companies throughout the United States. For more information contact Greg Baker at 408-514-3918, email gbaker@olympus-ita.com, or visit our website at www.olympus-ita.com.

E[acute accent]Photo at http://www.olympus-ita.com/images/AL110_System.jpg
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Publication:Business Wire
Date:Jul 11, 2006
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