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New MKS Process Analyzer Boosts Productivity for Leading 300mm Semiconductor Device Manufacturers; InDuct(TM) exhaust line gas analyzer reduces wafer scrap and tool downtime.

MKS Instruments, Inc., , a leading provider of products that measure, control, power, and monitor critical parameters of advanced manufacturing process environments, today announced that its new InDuct(TM) gas analyzer is achieving early success in 300mm wafer production at multiple fabs worldwide. The first of its kind to be mounted on the process exhaust line, the InDuct analyzer provides real-time data for use in validating process chamber gas concentrations in critical semiconductor processes, and is proven to enable automated APC (advanced process control) and fault detection functions, resulting in cost savings of hundreds of thousands of dollars in lost wafers and production time.

The small size of the InDuct analyzer allows it to be integrated into the exhaust line of a 200mm or 300mm CVD (chemical vapor deposition), ALD (atomic layer deposition) or etch process tool with zero impact on tool footprint. Unlike other advanced analyzers mounted directly on the process chamber, the InDuct rapidly provides quantitative measurements on numerous gas species in the exhaust stream, allowing the tool operator to validate the exact gas concentration of any given component. The InDuct then feeds that data back to the tool controller or fab data system to enable real-time APC functions such as fault detection, chamber matching and tuning, and closed loop control.

"The InDuct analyzer is a proven cost-saving technology in APC functions like fault detection, resulting in an overall increase in yields for device manufacturers," said Dr. John A. Smith, MKS Vice President and General Manager, Instruments and Control Systems. "MKS has drawn on its technology- leadership position in gas analysis and advanced process control to develop a first-of-its-kind analyzer that utilizes the compositional information from the process exhaust stream to afford significant process optimization and ROI for semiconductor device and flat panel manufacturers."

The compact, FT-IR based InDuct can measure many gas species in pressure ranges from milliTorr to above atmospheric pressure, and can measure gases at any temperature, making it ideal for use in high temperature and other process environments. In addition to fault detection and classification, the InDuct is well suited for etch endpoint and process monitoring applications.

MKS Instruments, Inc. is a leading worldwide provider of instruments and subsystems that measure, control, power, and monitor critical parameters of advanced manufacturing environments. MKS products are used in a diverse array of manufacturing, such as semiconductor, flat panel display, data storage, automotive, medical imaging, glass coatings, and gas lasers. To enable productivity, MKS supports its OEM and end-user customers around the world with best-in-class products, extensive process applications expertise, world-class manufacturing, and technical support.

Note to editors: To download a photo of the InDuct, please go to the MKS web site: http://www.mksinst.com/prinduct1.html.

CONTACT: Lisa Robillard of MKS, +1-978-975-2350 ext. 5541, lisa_robillard@mksinst.com; or Anita Giani of Technical Marketing Programs, +1-408-737-0285, anita@technicalmarketing.com; or Jonna Manes of MKS, +1-978- 975-2350 ext. 5524, jonna_manes@mksinst.com

Web site: http://www.mksinst.com/
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Geographic Code:1USA
Date:Sep 2, 2003
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