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National Institute of Advanced Industrial Science and Technology, Toyama University Develop Nano-machine Processing System That Works Inside Scanning Electron Microscope.

Tokyo, Japan, Mar 14, 2006 - (JCN) - The Fine Factory Research Group of the National Institute of Advanced Industrial Science and Technology (AIST) and a Toyama University research group have jointly developed a nano-machine processing system that works inside a scanning electron microscope (SEM). The joint research groups have successfully captured on video how the system cuts monocrystal silicon.

The system employs the mechanism of the atomic force microscope (AFM) and uses a microfabricated cantilever as a cutting tool. By altering loads at the tip of the cantilever that contacts the silicon surface, the system can control groove depth within a range of 1 to 100nm.

Through direct observation of this process, researchers are able to obtain detailed information on how materials are removed and identify optimal processing conditions. The latest technology is expected to speed up the commercial development of nanofabrication technology.

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Publication:JCNN News Summaries
Date:Mar 14, 2006
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