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Micro-electro-mechanical systems; proceedings.



Micro-electro-mechanical systems; proceedings.

ASME International Mechanical Engineering Congress and Exposition (2004: Anaheim, CA) (MEMS-v.6)

ASME, [c]2004

512 p.

$200.00 (pa)

This thick volume consists of 73 papers drawn from the November 2004 congress that explore MEMS testing and characterization, fabrication and packaging, materials, applied mechanics, micro/nano devices, microfluids, and thermal science issues. The large section of general papers discusses mechanical brakes for electrostatic actuators, top cap designs for the micro loop heat pipe, the stiffness and resonant frequency of a parylene suspended structure, and improvement of metal thin films by very low energy argon ion irradiation. Other topics include galvanic cell formation during MEMS release processes, the mechanical performance of a silicon diaphragm for space application, a testing facility for experimental investigation of MEMS dynamics, and bio/chemical sensing by thin membrane transducers. No subject index is provided.
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Publication:SciTech Book News
Article Type:Book Review
Date:Jun 1, 2005
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