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MICROLITHOGRAPHY CLUSTERS FROM GOLD STAR

 MINNEAPOLIS, July 15 /PRNewsire/ -- FSI International, Inc. (NASDAQ: FSII) announced today that it has received an order from Gold Star Electron Co. (GSEN) for two additional POLARIS Microlithography Clusters. The clusters will be used in their 16 meg DRAM facility located in Chung Ju, Korea. According to B.D. Sun, Gold Star's Managing Director, "Our evaluations proved to us that POLARIS is the right tool for 200 mm application at GSEN. The performance of the POLARIS currently installed in our fab has impressed us, as well as FSI's commitment to customer support."
 FSI Chairman Joel Elftmann stated, "As is the case with any high volume DRAM facility, Gold Star's primary concern is with highly efficient production. This repeat order is significant because it demonstrates the customer's satisfaction with the POLARIS equipment already operating in this environment."
 The POLARIS Microlithography Cluster, which sells for between $800,000 and $1.4 million, is an alternative to conventional track systems which use multiple handlers, buffer stations and elevators. The POLARIS Cluster consists of independent modules arranged around one or two cleanroom robots. Each module is totally independent and requires no mechanical interface. This methodology, coupled with simplicity of design, focuses on reliability which allows production clusters to demonstrate world-class process performance. Its optimized utilization of expose equipment and its efficient material flow have resulted in faster cycle times and increased throughput.
 FSI International is a leader in producing automated surface conditioning equipment for processing silicon wafers. The company develops, manufactures and markets spray processing systems, vapor phase processing systems, photoresist processing clusters and chemical management systems for use in the fabrication of advanced semiconductor integrated circuits. FSI's customers include semiconductor manufacturers located throughout North America, Europe, Japan and the Far East.
 -0- 7/15/93
 /CONTACT: Marian Briggs, 871-8877, of Padilla Speer Beardsley, for FSI; or Benno Sand (financial), 612-448-8936, or Robin Oestrich (media), 612-448-8974 of FSI/
 (FSII)


CO: FSI International, Inc. ST: Minnesota IN: SU:

DB -- MN020 -- 1988 07/15/93 12:57 EDT
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Publication:PR Newswire
Date:Jul 15, 1993
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