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LIGA and its applications.


LIGA and its applications.

Ed. by Volker Saile et al.



479 pages



Advanced micro & nanosystems; v.7


The core process in LIGA (the German acronym for lithography, electroplating, and polymer replication) is deep X-ray lithography at a synchrotron radiation source. This handbook covers technological aspects, design tools, optimization strategies, novel materials, and assembly pathways of LIGA, as well as applications, markets, and commercialization opportunities. Some specific topics explored include hot embossing of LIGA microstructures, X-ray masks for LIGA microfabrication, design for LIGA and safe manufacturing, polymer optics and optical MEMS, and refractive X-ray lenses produced by X-ray lithography. B&w photos and images are included. The book's readership includes physicists, electronics engineers, materials scientists, and graduate students. Saile is affiliated with Universitat Karlsruhe, Germany.

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Publication:SciTech Book News
Article Type:Book review
Date:Dec 1, 2010
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