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LEXT OLS4000 optical metrology instrument.

Olympus introduced the LEXT OLS4000, the latest version of the LEXT confocal laser scanning microscope metrology system. The OLS4000 brings a number of additional features and enhanced functionality, including near-vertical slope capabilities, larger optical zoom and navigation overview window. The new software also brings even the most complex of processes within easy reach of a broader range of users, with the use of different user interface sheets for the main tasks-acquisition, analysis, and reporting.


The Olympus LEXT OLS4000 has been designed with a larger and faster MEMS scanning mirror along with dual pinholes, which provides advanced confocal laser scanning microscopy. The larger mirror enables the system to provide superior optical quality, and the increased scan speed halves the time it takes to create a 3-D image of a sample. The 405-nm laser and dual pinholes operate simultaneously to ensure that the system provides the highest possible resolution and clarity, as well as enabling steep slope detection up to 85 [degrees], ensuring that even the most complex of surface topologies can be imaged and analyzed.

The new line scan function enables the LEXT to perform optical surface roughness measurements to the same international standards as cantilever-based systems. The new Z-drive provides movement steps of under 1 nm providing an accuracy of 10 nm, which ensures that 3-D measurements are extremely precise and repeatable. The new stage also enables much more precise movement and the instrument has a built in vibration cancellation system, ensuring that accuracy is not affected by sample navigation or external vibrations.

The new software, builds upon the concept of making complex optical metrology processes accessible to all users. Key analysis functions can be applied and utilized with great ease, ensuring that user errors are minimized and results are consistent between users. Reporting is also easy, with an intuitive report generator ensuring that data is always presented in the best possible way. What is more, each user can be assigned their own login and therefore their specific settings, files and projects are immediately available to them. This ensures that multi-user groups are free to define individual setups and that there is enhanced data security, both between users and groups.

* Olympus,

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Title Annotation:Tools of the Trade
Publication:R & D
Geographic Code:1USA
Date:Jun 1, 2009
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