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KLA-Tencor and Therma-Wave Settle Lawsuits.

Business Editors

FREMONT, Calif.--(BUSINESS WIRE)--April 10, 2001

KLA-Tencor Corp. (Nasdaq:KLAC) and Therma-Wave, Inc. (Nasdaq:TWAV) announced today that they have settled all pending litigation between them. As part of the settlement, KLA-Tencor has granted Therma-Wave a license on its U.S. Patent No. 4,899,055 entitled "Thin Film Thickness Measuring Method." In exchange, Therma-Wave has granted KLA-Tencor a license on its U.S. Patent No. 5,596,406, entitled "Sample Characteristic Analysis Utilizing Multi Wavelength And Multi Angle Polarization And Magnitude Change Detection;" and U.S. Patent No. 5,798,837 and 5,900,939, both entitled "Thin Film Optical Measurement System and Method With Calibrating Ellipsometer." In addition, Therma-Wave agreed to modify its products to avoid using certain technology patented by KLA-Tencor and both parties agreed to a moratorium on any patent litigation for an undisclosed period of time. The settlement also resulted in a payment of an undisclosed sum to KLA-Tencor.

About KLA-Tencor: KLA-Tencor is the world leader in yield management and process control solutions for semiconductor manufacturing and related industries. Headquartered in San Jose, Calif., the company has sales and service offices around the world. An S&P 500 company, KLA-Tencor is traded on the Nasdaq National Market under the symbol KLAC. Additional information about the company is available on the Internet at

About Therma-Wave: Since 1982, Therma-Wave, Inc. has been revolutionizing process control metrology systems through innovative, proprietary products and technologies. The company is a worldwide leader in the development, manufacture, marketing and service of process control metrology systems used in the manufacture of semiconductors. Therma-Wave currently offers leading-edge products to the semiconductor industry for the measurement of transparent, semi-transparent and opaque thin films, for the monitoring of ion implantation, and for the integration of metrology into semiconductor processing systems. For further information about Therma-Wave, Inc., access our web site at:
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Publication:Business Wire
Geographic Code:1USA
Date:Apr 10, 2001
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