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KLA-Tencor Files Patent Infringement Suit Against Therma-Wave, Inc.

SAN JOSE, Calif.--(BUSINESS WIRE)--July 22, 1999--

KLA-Tencor Corp. (Nasdaq:KLAC) today announced it has filed a patent infringement suit against Therma-Wave, Inc., in the United States District Court for the Northern District of California.

The suit alleges that Therma-Wave has infringed and continues to infringe KLA-Tencor's Patent Number 5,910,842, entitled "Focused Beam Spectroscopic Ellipsometry Method and System," which was issued June 8, 1999.

Therma-Wave offers for sale, in California and elsewhere, devices and processes that the Company believes to be covered by this KLA-Tencor patent. In addition, KLA-Tencor alleges that Therma-Wave has actively induced the use of the patented process by others outside the United States for products that are then imported into the United States.

The suit seeks both damages for the patent infringement as well as an injunction against any future infringing activity, either solely by Therma-Wave or by any third-party working in conjunction with them.

About KLA-Tencor: KLA-Tencor is the world leader in yield management and process control solutions for semiconductor manufacturing and related industries. Headquartered in San Jose, the company has sales and service offices around the world. An S&P 500 company, KLA-Tencor is traded on the Nasdaq National Market under the symbol KLAC. Additional information about the company is available on the Internet at
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Publication:Business Wire
Geographic Code:1USA
Date:Jul 22, 1999
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