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FUSION SYSTEMS CORPORATION ANNOUNCES INTRODUCTION OF DUAL CHAMBER ASHERS.

ROCKVILLE, MD.--(BUSINESS WIRE)--July 6, 1995--Fusion Systems Corporation (Nasdaq NM: FUSN) announced that Fusion Semiconductor Systems, a division of Fusion Systems Corporation, has introduced two new high-productivity asher products for removal of photoresist from semiconductor wafers. Fusion has upgraded its production-proven ozone asher and downstream plasma asher and incorporated them onto the Gemini platform, a state of the art dual-chamber system.

Each of the new Gemini ashers can double the number of wafers processed per hour, while occupying only 25 percent more space than a single chamber system. The Gemini systems set new productivity standards for ashing by achieving throughput of nearly 100 wafers per linear meter of cleanroom frontage, more than 50% above the closest competitor. With their attractive pricing, high throughput and a small faceprint, Gemini ashers provide the highest throughput per invested dollar in the industry. In addition, Fusion's ozone and microwave plasma ashers have nearly damage-free process capability, with the lowest measured damage from free ions of any available single-wafer system.

Fusion enables its customers to "mix and match" processes in a fab using its dual- and single-chamber ozone and microwave plasma downstream ashers to optimize performance at each ashing step. This optimization is achieved cost effectively since both processes are provided on Fusion's production-proven wafer handling platform. The new Gemini ashers will be on display at Semicon West, booth 1536.

Fusion Systems Corporation is a leading supplier of photostabilizers and single-wafer ashers and the leading worldwide supplier of ultraviolet curing systems. The Company's photostabilizers and single-wafer ashers are used in the fabrication of semiconductor devices, and the UV curing systems are used in manufacturing, printing and coating applications in a broad range of industries. The Company is headquartered in Rockville, Maryland and has offices throughout the United States, Europe, Japan and Korea.

CONTACT: Fusion Systems Corporation, Rockville

Kirk Winkler, 301/251-0300
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Publication:Business Wire
Date:Jul 6, 1995
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