FUSION SYSTEMS CORPORATION ANNOUNCES INTRODUCTION OF DUAL CHAMBER ASHERS.
Each of the new Gemini ashers can double the number of wafers processed per hour, while occupying only 25 percent more space than a single chamber system. The Gemini systems set new productivity standards for ashing by achieving throughput of nearly 100 wafers per linear meter of cleanroom frontage, more than 50% above the closest competitor. With their attractive pricing, high throughput and a small faceprint, Gemini ashers provide the highest throughput per invested dollar in the industry. In addition, Fusion's ozone and microwave plasma ashers have nearly damage-free process capability, with the lowest measured damage from free ions of any available single-wafer system.
Fusion enables its customers to "mix and match" processes in a fab using its dual- and single-chamber ozone and microwave plasma downstream ashers to optimize performance at each ashing step. This optimization is achieved cost effectively since both processes are provided on Fusion's production-proven wafer handling platform. The new Gemini ashers will be on display at Semicon West, booth 1536.
Fusion Systems Corporation is a leading supplier of photostabilizers and single-wafer ashers and the leading worldwide supplier of ultraviolet curing systems. The Company's photostabilizers and single-wafer ashers are used in the fabrication of semiconductor devices, and the UV curing systems are used in manufacturing, printing and coating applications in a broad range of industries. The Company is headquartered in Rockville, Maryland and has offices throughout the United States, Europe, Japan and Korea.
CONTACT: Fusion Systems Corporation, Rockville
Kirk Winkler, 301/251-0300
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|Date:||Jul 6, 1995|
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