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FSI INTERNATIONAL UNVEILS THIRD GENERATION OZONE PROCESS.

FSI International (Nasdaq:FSII), Minneapolis, has introduced its new third generation ozone process for front-end-of-line (FEOL) resist strip and post-ash clean. This new offering marks a groundbreaking advance in ozone processing through the pairing of generous economic benefits with environmentally friendly initiatives at a low cost of ownership (COO). Developed for use in the volume production of microchips, the third generation ozone process can be run on FSI's batch spray tools, including the ZETA(R) 300, ZETA(R) 200 and MERCURY(R) systems.

"As a result of this advancement, ozone processing now not only provides environmental benefits but also productivity and cost advantages," said John Ely, president, FSI Surface Conditioning Division. "For customers intent on reducing overall production cycle time, our third generation ozone process offers short cycle time and high throughput at a low COO. This process is clearly a win-win solution for our customers and the environment."

When compared to competitors' Piranha-SC1 methods, FSI's third generation ozone process is significantly superior, providing an increase in throughput of up to 90 percent for 200mm manufacturing and up to 50 percent for 300mm manufacturing. Furthermore, FSI's third generation ozone process offers COO savings of up to 65 percent compared to competitors' Piranha-SC1 and ozone-SC1. Specifically, the new process reduces chemical consumption by greater than 95 percent, with the complete elimination of H2SO4 and reduction of H2O2. This reduction diminishes the environmental impact caused by waste treatment measures and the risks associated with chemical handling, while decreasing the chemical cost.

The third generation ozone process is fully characterized and ready for field installation. The ozone generator can be installed in the sub-fab and is readily integrated. Dedicated applications support is available to aid interested customers.

FSI International, Inc. is a leading global supplier of processing equipment used at key production steps to manufacture microelectronics, including semiconductor devices and thin-film heads. The company develops, manufactures, markets and supports products used in the technology areas of microlithography and surface conditioning. FSI International's customers include microelectronics manufacturers located throughout North America, Europe, Japan and the Asia-Pacific region.

For more information, visit http://www.fsi-intl.com or call 952/448-8066.
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Publication:Industrial Environment
Date:Oct 1, 2001
Words:355
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