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FSI INTERNATIONAL ANNOUNCES ORDERS FOR 10 POLARIS MICROLITHOGRAPHY CLUSTERS FROM TEXAS INSTRUMENTS AND IBM

 MINNEAPOLIS, Oct. 14 /PRNewswire/ -- FSI International, Inc. (NASDAQ: FSII), a manufacturer of capital equipment for the semiconductor industry, announced today that it has received orders for a total of 10 POLARIS(R) Microlithography clusters from Texas Instruments, Inc. (TI) and International Business Machines Inc. (IBM).
 The clusters purchased by TI will be used in several different semiconductor manufacturing facilities. According to Rob Simpson, capital equipment purchasing manager at TI, "FSI has successfully demonstrated the ability of the POLARIS cluster to make continuing improvements in quality, cycle time and yields."
 According to Len Johnson, IBM's capital equipment procurement manager, microelectronics division, "The results of an extensive cost of ownership evaluation, along with the continuous improvement support which FSI has provided our Essex Junction facility, convinced IBM to further develop our relationship with FSI." The POLARIS is used in IBM's 16 megabit logic device manufacturing facility in Essex Junction, Vermont.
 FSI president, chairman and chief executive officer, Joel Elftmann, stated, "By selecting FSI as the supplier of their linked lithography needs, TI and IBM have played a considerable role in the growth of our microlithography cluster business. These orders indicate the value they are placing on our demonstrated commitment to the customer."
 The POLARIS Microlithography cluster, which sells for between $800,000 and $1.4 million, is an alternative to conventional track systems which use multiple handlers, buffer stations and elevators. The POLARIS Cluster was originally developed by TI and is now manufactured under license from TI and distributed by FSI. The POLARIS Cluster consists of independent modules arranged around one or two clean room robots. Each module is independent and requires no mechanical interface. This methodology, coupled with simplicity of design, focuses on reliability and process performance. Its optimized utilization of exposure equipment and efficient material flow have resulted in faster cycle times and increased throughput, compared with conventional track systems.
 FSI International, Inc. is a leader in producing automated surface conditioning equipment for processing silicon wafers. The company develops, manufactures, markets and services photoresist processing clusters, spray processing systems, vapor phase processing systems and chemical management systems for use in the fabrication of advanced semiconductor integrated circuits. FSI's customers include semiconductor manufacturers located throughout North America, Europe, Japan and the Far East.
 -0- 10/14/93
 /CONTACT: Marian Briggs of Padilla Speer Beardsley, 612-871-8877, for FSI; or Benno Sand of FSI, 612-448-8936/
 (FSII)


CO: FSI International, Inc. ST: Minnesota IN: SU:

DB-DS -- MN011A -- 2104 10/14/93 10:19 EDT
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Publication:PR Newswire
Date:Oct 14, 1993
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