Printer Friendly

FSI INTERNATIONAL ANNOUNCES MOTOROLA ORDER FOR TWO POLARIS MICROLITHOGRAPHY CLUSTERS

 MINNEAPOLIS, Feb. 11 /PRNewswire/ -- FSI International, Inc. (NASDAQ: FSII) announced today an order from Motorola for two FSI POLARIS(TM) Microlithography Clusters. The systems will be dedicated to advanced semiconductor processing (sub-0.5fm) at Motorola's Advanced Products Research and Development Laboratory (APRDL) in Austin, Texas.
 "The selection of FSI was the result of over 16 months of extensive evaluation by Motorola's Strategic Equipment Technology Team," said Steve Wilson, Motorola semiconductor sector equipment sourcing manager. "All elements of our total cost model were exercised by the evaluation." Representatives from APRDL visited several suppliers and wafer fab sites in evaluating competitive system performance, reliability, maintainability and software flexibility. "We are confident we have purchased a world-class system and that it will emerge even stronger through this cooperative program," concluded Wilson.
 The POLARIS Microlithography Cluster, each of which sells for between $800,000 and $1.4 million, is an alternative to conventional track systems which use multiple handlers, buffer stations and elevators. The POLARIS system consists of a cluster of independent modules arranged around one or two cleanroom robots. Each module is totally independent and requires no mechanical interface. This methodology, coupled with simplicity of design, has allowed production systems to demonstrate world-class mean time between failures.
 According to Joel Elftmann, president, chairman and chief executive office of FSI, "This is a cooperative effort on the part of Motorola and FSI which will involve characterization, optimization, and improvement of the hardware and software to support Motorola's aggressive process requirements."
 FSI International is a leader in producing automated surface conditioning equipment for processing silicon wafers. The company develops, manufactures and markets spray processing systems, vapor phase processing systems, photoresist processing clusters and chemical management systems for use in the fabrication of advanced semiconductor integrated circuits. FSI's customers include semiconductor manufacturers located throughout North America, Europe, Japan and the Far East.
 -0- 2/11/93
 /CONTACT: Benno Sand (financial), 612-448-8936, or Robin Oestreich (media) 612-448-8974, both for FSI International; or Mariani?ggs of Padilla Speer Beardsley, 612-871-8877, for FSI/
 (FSII)


CO: FSI International, Inc. ST: Minnesota IN: CPR SU:

KH -- MN032 -- 5611 02/11/93 10:34 EST
COPYRIGHT 1993 PR Newswire Association LLC
No portion of this article can be reproduced without the express written permission from the copyright holder.
Copyright 1993 Gale, Cengage Learning. All rights reserved.

Article Details
Printer friendly Cite/link Email Feedback
Publication:PR Newswire
Date:Feb 11, 1993
Words:353
Previous Article:KLM AND MLT UNVEIL SUMMER EUROPE ON-THE-DOUBLE
Next Article:EG&G REPORTS STRONG YEAR END RESULTS
Topics:


Related Articles
FSI ANNOUNCES ORDERS FOR THREE POLARIS(TM) WORK CELLS; SLOAN JOINING COMPANY AS EXECUTIVE VICE PRESIDENT, MICROLITHOGRAPHY WORK CELL DIVISION
FSI INTERNATIONAL, INC. ANNOUNCES SIXTH CONSECUTIVE QUARTER OF FINANCIAL IMPROVEMENT
FSI INTERNATIONAL AND ITS EUROPEAN AFFILIATE, METRON SEMICONDUCTORS EUROPA, ANNOUNCE $3.1 MILLION ORDER FROM ERICSSON-SWEDEN
MICROLITHOGRAPHY CLUSTERS FROM GOLD STAR
FSI INTERNATIONAL ANNOUNCES ORDERS FOR 10 POLARIS MICROLITHOGRAPHY CLUSTERS FROM TEXAS INSTRUMENTS AND IBM
FSI INTERNATIONAL ANNOUNCES ORDERS FOR FIVE POLARIS MICROLITHOGRAPHY CLUSTERS
FSI INTERNATIONAL ANNOUNCES ORDER FOR SEVEN POLARIS 2000 MICROLITHOGRAPHY CLUSTERS FROM CYRIX
FSI INTERNATIONAL ANNOUNCES ORDERS FOR 13 POLARIS(R) 2000 MICROLITHOGRAPHY CLUSTERS
FSI INTERNATIONAL ANNOUNCES TWO NEW MICROLITHOGRAPHY CLUSTER SYSTEMS

Terms of use | Copyright © 2016 Farlex, Inc. | Feedback | For webmasters