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FSI ANNOUNCES ORDERS FOR THREE POLARIS(TM) WORK CELLS; SLOAN JOINING COMPANY AS EXECUTIVE VICE PRESIDENT, MICROLITHOGRAPHY WORK CELL DIVISION

FSI ANNOUNCES ORDERS FOR THREE POLARIS(TM) WORK CELLS; SLOAN JOINING COMPANY AS EXECUTIVE VICE PRESIDENT, MICROLITHOGRAPHY WORK CELL DIVISION
 MINNEAPOLIS, Jan. 22 /PRNewswire/ -- FSI International, Inc. (NASDAQ: FSII), announced today that it has received an order for three POLARIS(TM) Microlithography Work Cell systems from a major, U.S.-based semiconductor manufacturer. The orde ?for the company's 200mm Microlithography Work Cells, modified to process 125mm wafers. The POLARIS sells for between $800,000 and $1.4 million, depending on the options included. Today's announcement brings the total number of POLARIS systems ordered to-date to eight.
 Dr. Ben J. Sloan joins FSI as an executive vice president in charge of the Microlithography Work Cell Division. In addition to Sloan, FSI has hired 17 engineers and technicians who are experienced in developing, manufacturing, and servicing the Microlithography Work Cell. FSI will have approximately 40 employees involved in this area -- in support of its POLARIS product and technology.
 "We are very pleased to have Dr. Sloan join our team," said Joel Elftmann, FSI chairman, president, and chief executive officer. "In addition to heading our Microlithography Work Cell Division, Dr. Sloan will provide leadership to the FSI Technical Advisory Board and assist in defining new product direction."
 Sloan was vice president, Semiconductor Group and director, Manufacturing Technology Center of Texas Instruments. He held various research and development positions at TI during the last 24 years, including manager, Wafer Fab Systems Division of the Process Automation Center for seven years, while the Microlithography Work Cell was being developed and manufactured. Sloan has a doctorate in Electrical Engineering from North Carolina State University.
 FSI International, Inc. is a leader in producing automated surface conditioning equipment for processing silicon wafers. The company develops, manufactures, markets and services centrifugal spray processing systems, vapor phase processing systems, photoresist processing equipment, and chemical management and delivery systems for use in the fabrication of advanced semiconductor integrated circuits. FSI's customers include semiconductor manufacturers located throughout North America, Europe, Japan and the Far East.
 -0- 01/22/92
 /CONTACT: Benno Sand of FSI International, 612-448-8936, or Marian Briggs of Padilla Speer Beardsley, 612-871-8877, for FSI/
 (FSII) CO: FSI International ST: Minnesota IN: SU:


KH -- MN003 -- 2129 01/22/92 09:47 EST
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Date:Jan 22, 1992
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