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FSI ANNOUNCES ORDERS FOR 13 POLARISTM WORK CELLS

 FSI ANNOUNCES ORDERS FOR 13 POLARISTM WORK CELLS
 MINNEAPOLIS, Feb. 19 /PRNewswire/ -- FSI International, Inc.


(NASDAQ: FSII), announced today that it has received an order for 13 200mm POLARISTM Microlithography Work Cell systems. Each POLARIS sells for between $800,000 and $1.4 million, depending on options included. Today's announcement brings the total number of POLARIS systems ordered to date to 21.
 "We are very pleased with the initial market acceptance of our POLARIS product," said Joel Elftmann, FSI chairman, president, and chief executive officer. "Despite the difficult business environment of the past two years, we maintained our R&D commitment, which with the hard work of all FSI employees, seems to be paying off."
 FSI International, Inc. is a leader in producing automated surface conditioning equipment for processing silicon wafers. The company develops, manufactures, markets and services centrifugal spray processing systems, vapor phase processing systems, photoresist processing equipment, and chemical management and delivery systems for use in the fabrication of advanced semiconductor integrated circuits. FSI's customers include semiconductor manufacturers located throughout North America, Europe, Japan and the Far East.
 -0- 2/19/92
 /CONTACT: Benno Sand of FSI International, 612-448-8936, or Marian Briggs of Padilla Speer Beardsley, 612-871-8877, for FSI International/
 (FSII) CO: FSI International ST: Minnesota IN: SU:


AL -- MN001 -- 0274 02/19/92 08:45 EST
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Date:Feb 19, 1992
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