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Entegris to Supply 200 mm Carriers to China Fab; Semiconductor Manufacturing International Corporation Selects Entegris to Supply Wafer Handling Products.

Business Editors & Technology Writers

CHASKA, Minn.--(BUSINESS WIRE)--July 10, 2001

Entegris Inc. (Nasdaq:ENTG), the materials integrity management company, today announced it has received an order for its KA200 PEEK(TM) wafer carriers to protect and transport all Semiconductor Manufacturing International Corporation's (SMIC's) 200 mm wafers. The 200 mm carriers are expected to ship by January 2002. Follow-on orders are expected.

These systems will be installed in Fab 1 of the first phase of SMIC's project in Shanghai. SMIC is currently constructing three fabs in the ZhangJiang Hi-Tech Park in Shanghai. With this first phase, SMIC will have a full capacity of over 45,000 wafers per month that will increase to over 90,000 wafers per month with the completion of stage two before 2004. SMIC plans to be in the first-tier of semiconductor foundries and will eventually expand their facility to nine fabs in Shanghai.

"Entegris' history of expertise in protecting and transporting valuable wafers, their direct regional support in China, along with the products ability to provide precise wafer access and reliable operation with equipment have been important factors in our selection of Entegris as a strategic partner for wafer handling. When evaluating the Entegris product against the competition the superior performance of the KA200 200 mm wafer carrier allowed us to select them," says Marco Mora, SMIC vice president of operations.

"This order represents the confidence Chinese customers have in the ability of Entegris, its products and services to protect the delicate wafers while performing with consistent reliability in the highly automated wafer processing fab," says Michael Wright, president of Entegris microelectronics group. "We are pleased SMIC has selected Entegris allowing us to further participate in the growing China semiconductor market."


Entegris products and services protect and transport the critical materials that enable the world's leading technologies. Entegris is a leading materials integrity management company providing products and services used from production to consumption in the semiconductor, data storage, chemical processing, pharmaceutical and other key technology-driven industries worldwide.

Entegris is headquartered in Chaska, Minnesota, USA and has manufacturing facilities in the United States, Germany, Japan and Malaysia and is ISO 9001 certified. Directly and through strategic alliances with Metron Technology, Marubeni and other distributors, Entegris provides customer support on six continents. Additional information can be found at


Certain information in this news release does not relate to historical financial information and may be deemed to constitute forward-looking statements within the meaning of the Private Securities Litigation Reform Act of 1995. Such statements are subject to certain risks and uncertainties that could cause the company's actual results in the future to differ materially from its historical results and those presently anticipated or projected.

Among these risks and uncertainties are general economic conditions, cyclical nature of the semiconductor industry, and risks associated with the acceptance of new products, completion of potential acquisitions and the smooth transition of the product, sales and marketing integration. Other factors that could cause the company's results to differ materially from those contained in its forward looking statements are included in the 10K filed in November 2000 and other documents filed by the company with the Securities and Exchange Commission.
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Publication:Business Wire
Geographic Code:1USA
Date:Jul 10, 2001
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