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Eaton Semiconductor Announces Win of White Oak Contract

Motorola/Siemens AG joint venture is first to purchase entire suite of
 Eaton's products

BEVERLY, Mass., Oct. 14 /PRNewswire/ -- Eaton Semiconductor Equipment Operations (SEO), today announced that the company has been selected to provide its entire product line of ion implanters, thermal processing system and photostabilizers to White Oak Semiconductor. White Oak is a joint venture between Motorola SPS and Siemens Semiconductor Group. With this agreement, Eaton SEO will be the primary supplier of ion implantation, thermal processing and photostabilization equipment for the Sandston, Virginia-based facility.

The order includes Eaton's entire product line, including: GSD/200E2 high current systems, 8250 medium current systems and GSD/HE high energy systems, from Eaton's Implant Systems Division (ISD); Reliance 850 rapid thermal processor from Eaton's newly formed Thermal Processing Systems Division (TPS); and photostabilizers from the recently-acquired Fusion Systems Division. A comprehensive after sales support package is also included as part of the sale. The initial systems are scheduled to ship in October 1997.

"Both Motorola and Siemens have always had a strong commitment to Eaton's products and we are extremely pleased to extend these relationships through the White Oak joint venture," said Peter Younger, vice president of Eaton SEO. "The relentless scaling of silicon devices to increasingly smaller geometries places great demands on device manufacturers. At Eaton, we are committed to offering complete solutions for our customers' most demanding applications." Younger continued, "With the industry's only complete line of ion implantation, thermal processing, photostabilization and photoresist stripping equipment, we are uniquely positioned to offer our customers integrated process solutions."

The $1.5 billion state-of-the-art facility will begin production of 64-megabit dynamic random access memory chips (DRAMS) on 8-inch wafers beginning in mid-1998. These components are used in manufacturing computers, multimedia products and a variety of information processing equipment.

About Eaton Semiconductor Equipment Operations

Eaton Semiconductor Equipment Operations (SEO), headquartered in Beverly, Massachusetts, is a unit of Eaton Corporation (NYSE: ETN). Eaton SEO is comprised of four business units: Implant Systems Division, Thermal Processing Systems, Fusion Systems and Flat Panel Equipment. Since 1978, Eaton's Implant Systems Division (ISD) has led the market in the manufacture of high current, medium current and high energy ion implantation equipment.

In 1996, the company expanded its product offering to include Eaton Thermal Processing Systems (TPS), providing fast ramp vertical furnaces and rapid thermal processors for semiconductor manufacturing, and Eaton Flat Panel Equipment (FPE), dedicated to the development and manufacture of implant systems specifically designed for the next generation of flat panel manufacturing processes. In 1997, Eaton acquired Fusion Systems Corporation, a leading supplier of photostabilization and photoresist stripping equipment. Eaton SEO has manufacturing facilities in Beverly, Massachusetts; Peabody, Massachusetts; Austin, Texas; Rockville, Maryland and Kyunggi-do, Korea as well as in Toyo, Japan through its joint venture with Sumitomo Heavy Industries. During 1996, annual sales for Eaton SEO
reached more than $625 million. During 1996 annual sales for Fusion were $84 million. Eaton SEO and its joint venture Sumitomo Eaton Nova employ more than 2,700 people in the U.S. and abroad.

Eaton Corporation is a global manufacturer of highly engineered products which serve industrial, vehicle, construction, commercial and aerospace markets. Principle products include electrical power distribution and control equipment, truck transmissions and axles, engine components, hydraulic products, ion implanters and a wide variety of controls. Headquartered in Cleveland, the company has 55,000 employees and 155 manufacturing sites in 26 countries around the world. Sales for 1996 were $7 billion.

About White Oak

White Oak Semiconductor, a joint venture between Siemens Semiconductor Group and Motorola's Semiconductor Products Sector, will employ between 1000 and 1500 people at the Sandston, Virginia facility. The facility, located on 210 acres in the White Oak Technology Park near the Richmond International Airport, is designed for fully integrated wafer manufacturing, assembly and final test, and will serve as White Oak Semiconductor World Headquarters.

SOURCE Eaton Semiconductor Equipment Operations
 -0- 10/14/97

/CONTACT: Amy McKnight or Jennifer Aprile of Schwartz Communications, Inc., 617-684-0770, or Maureen Hart of Eaton SEO, 508-921-9822,


CO: Eaton Semiconductor Equipment Operations; Eaton Corporation; White Oak

Semiconductor ST: Massachusetts, Texas IN: CPR SU: CON

LZ -- NEMTU02 -- 2358 10/14/97 08:29 EDT
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Publication:PR Newswire
Date:Oct 14, 1997
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