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Cluster 300 Mm Of Dielectric Deposits Sio2, Sin And Low K.

Contract notice:Cluster 300 mm of dielectric deposits SiO2, SiN and Low K.

Multi-reactor system for ALD / PEALD / PECVD deposition of dielectric materials (SiO2, SiN, Low K, ...) for the treatment of 300 mm diameter plates. The equipment should be fully automatic and the reactors should be able to work between 50 and 550 C ... It will be installed in the clean rooms of CEA-LETI Microelectronics where it will be used 7 days a week and 24 hours a day.

This contract is divided into lots: no

Time-limit for receipt of tenders or requests to participate: Date 18/09/2017

Local time 1600

Major organization : CEA CENTRE DE GRENOBLE

Address : 17 rue des Martyrs

Grenoble Cedex 9

38054

Contact person: Acheteur Mme Vilela Stephanie

Country :France

Email : stephanie.vilela@cea.fr

Tender notice number : 294144-2017

Notice type : Tender Notice

Open date : 2017-09-18

Tender documents : T41240797.html

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Publication:Mena Report
Date:Jul 29, 2017
Words:158
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