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Axcelis Technologies Celebrates Sale of 500th Gemini Tool, The FusionGemini ES; Marks Milestone Sale to European Semiconductor Manufacturer.

Business/Technology Editors

BEVERLY, Mass.--(BUSINESS WIRE)--April 18, 2001

Axcelis Technologies, Inc., (NASDAQ: ACLS), today commemorated the sale of its 500th FusionGemini system, a FusionGemini ESTM (Enhanced Strip) purchased by a world-renowned European semiconductor manufacturer.

Selected in part because of Axcelis' commitment to customer service, support, training and the advancement of process technology, the FusionGemini ES also provides this long-time customer with high yield at a low cost of ownership, allowing for superior products and margins needed to stay ahead in a competitive market.

"The long, prosperous relationship between Axcelis and this particular customer is one that we greatly value and continue to honor," said Michael Dreyer, Vice President and General Manager of Axcelis Technologies Photoresist Processing Division, "Unlike competitive platforms, the FusionGemini ES tool eliminates the need for multiple post-strip cleaning processes, saving time and money. The FusionGemini platform also creates cross-tool commonality that reduces spares inventories, and minimizes training and service requirements."

The FusionGemini ES is designed and manufactured to meet the demands and productivity requirements of advanced IC manufacturing, including the elimination of "wet" chemical processing previously needed to remove post strip residues. The FusionGemini ES provides the "dry" solution through the use of specialized gas chemistries, resulting in dry strip processes that require a single follow-up DI water rinse. Resist strip and residue removal are performed in the same chamber, providing high throughput and rapid parallel processing. The FusionGemini ES provides the lowest damage of any residue removal-capable plasma asher in the industry. Radiant heating enables multi-temperature stripping for the fastest processes, while eliminating resist "popping" and residues. An Axcelis-proprietary designed plasma source, containing no tuning stubs, optimizes the plasma source over the entire operating range.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity manufacturing solutions for the semiconductor industry. Axcelis is dedicated to the design and manufacture of high current, medium current and high energy ion implantation equipment, rapid thermal processing systems, photostabilization and photoresist stripping equipment. Axcelis Technologies has manufacturing facilities in Beverly and Rockville, Maryland, as well as in Toyo, Japan through its joint venture Sumitomo Eaton Nova. The company's Internet address is: http://www.axcelis.com.
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Publication:Business Wire
Geographic Code:1USA
Date:Apr 18, 2001
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