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Akrion Will Ship GAMA FEOL Clean System.

System Will Be Used for Critical Pre-gate Cleaning

ALLENTOWN, Pa., June 14 /PRNewswire/ -- Akrion announced that it will ship a GAMA Series FEOL Clean system to a major manufacturer of analog semiconductor devices based in Texas.

The GAMA system, valued at $1.6 million, will be used for critical pre- gate cleaning on a 150/200mm manufacturing line and will ship in Q3 of this year. The mature GAMA batch-immersion system has been upgraded continuously since its inception to accommodate the growing needs of device manufacturers. Systems are available for 150, 200 and 300mm wafers. The modular GAMA is available in many configurations for varied etching, cleaning and stripping applications. GAMA integrates with most wafer handling automation including SMIF and FOUP.

About Akrion

Akrion is a leading provider of wet cleaning systems for the semiconductor industry. The company designs, manufactures, installs and services advanced batch-immersion and single-wafer wet cleaning equipment used in the production of a diverse range of semiconductor and related devices, including integrated circuits, micro-electrical mechanical systems (MEMS) and photomasks. Headquartered in Allentown, Pa., Akrion's Allentown production facility is ISO 9001:2000 and ISO 14001:1996 certified. The company Web site is located at

CONTACT: Corporate Contact: Donald Roberts, Akrion, Inc., +1-610-530-3368,; or Agency Contact: Julie Lass, Loomis Group, +1-512-457-9400,, for Akrion

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Publication:PR Newswire
Date:Jun 14, 2005
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