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A T M I's Sub-Atmospheric Gas Sources Now Preferred Standard; Factory Mutual Specifies A T M I Products as Preferred Gas Storage & Delivery Method.

Business Editors

DANBURY, Conn.--(BUSINESS WIRE)--April 25, 2000

A T M I, Inc. (Nasdaq:ATMI), today announced that its sub-atmospheric gas storage and delivery product lines -- known as the SDS(R) (Safe Delivery Source) and SAGE(R) (Sub-Atmospheric Gas Enhanced) Gas Sources -- are the preferred method to safely store and deliver dopant gases for semiconductor processing, as specified by Factory Mutual Engineering Corp.

Factory Mutual's latest (September 1999) Property Loss Prevention Data Sheets states: "Sub-atmospheric dopant gas sources should be used instead of high pressure cylinder sources whenever process compatibility will allow."

Factory Mutual Research is a world-renowned organization with over 100 years' experience in advancing property loss prevention through scientific research, independent third-party product testing, and the development of engineering guidelines. Factory Mutual Research Approval indicates to a company's clients that a product conforms to the highest industry and property protection standards and will continue to meet those standards.

Dennis Brestovansky, A T M I's Vice-President of Gas Product Operations, said, "We welcome Factory Mutual's recognition of the inherent safety benefits of A T M I's sub-atmospheric SDS and SAGE Gas Source technologies. It's a fine addition to the strong reputation these products enjoy, and should help introduce more customers to the production efficiencies of sub-atmospheric gas storage and delivery. This is another feather in the cap for A T M I's internally-developed SDS Gas Source products."

Doug Neugold, A T M I's Executive Vice-President for Materials, said, "A T M I is recognized for the innovative technologies it develops and brings to the semiconductor marketplace. We began initial development work on what is now the SDS Gas Source technology in the late 1980's. Now we are poised to continue to expand the gases and markets we serve with additional sub-atmospheric gas delivery product lines."

SDS Gas Source Background

A T M I introduced its revolutionary sub-atmospheric gas packaging technology in 1994 to the ion implant market of the semiconductor industry. In 2000, more than 80% of all ion implanters produced in the U.S. are expected to ship ready to use A T M I's sub-atmospheric pressure gas sources.

A T M I's adsorbent technology -- special materials with chemical "hooks"-latches onto the gas molecules. This reduces the gas vapor pressure, effectively converting it into a "no pressure" material. Gas is released when pulled out by the vacuum that is typical in most semiconductor processes. The sub-atmospheric safety systems allow hazardous semiconductor production gases to be stored and delivered at sub-atmospheric pressures.

By using this novel "no-pressure" technology, industrial customers have realized dramatic risk reductions related to both property loss and personnel health. Independent studies confirm significant productivity benefits. Safety codes and best practices guidelines are now starting to specify A T M I's sub-atmospheric gas sources. A T M I's sub-atmospheric gas sources also contribute additional customer benefits because of relaxed building and fire codes that reflect its inherent safety. This means shorter construction times, lower costs, and improved flexibility for hazardous process material storage and use.

The semiconductor industry's broad acceptance of A T M I's SDS Gas Source technology created demand for additional sub-atmospheric gas delivery systems for previously hazardous high-pressure gases. A T M I introduced its second sub-atmospheric technology, SAGE -- Sub-Atmospheric Gas Enhanced -- for chemical vapor deposition (CVD) chip production processes, in 1998.

Factory Mutual is an affiliate of FM Global, the world's largest insurance organization solely dedicated to commercial and industrial property protection. FM Global, through its affiliates and its subsidiaries, specializes in commercial and industrial property insurance and property protection.

A T M I provides specialty materials and related equipment and services to the worldwide semiconductor industry. Related equipment includes materials packaging systems, delivery systems, sensors, and a full line of environmental equipment. Services include materials management, equipment servicing, and thin film deposition.

Statements which are not historical information are forward looking, and involve risks and uncertainties, including, but not limited to: changes in semiconductor industry growth or A T M I's markets; competition, problems, or delays developing and commercializing new products; problems or delays in integrating acquired operations and businesses into A T M I; and other factors discussed in A T M I's filings with the Securities and Exchange Commission. Such risks and uncertainties could cause actual results to differ from those projected.

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Publication:Business Wire
Geographic Code:1USA
Date:Apr 25, 2000
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