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1st Silicon Selects Applied Materials' SiNgen and Radiance Technologies for High Performance Transistor Fabrication.

Business Editors/High-Tech Writers

SANTA CLARA, Calif.--(BUSINESS WIRE)--June 3, 2004

Applied Materials, Inc. (Nasdaq:AMAT) announced today that 1st Silicon of Malaysia has purchased its Applied Centura(R) SiNgen(TM) LPCVD(1) and Applied Centura(R) Radiance(TM) RTP(2) systems for fabricating advanced logic, flash and embedded flash chips in its Fab 1 foundry facility in Kuching.

According to Dr. John Nelson, chief executive officer of 1st Silicon, "This equipment will help us to support our niche processes such as flash, embedded flash, image sensor and high voltage, in addition to standard logic and mixed signal devices. As we extend our technologies, we see Applied Materials as being an integral part of our process development activities. Applied Materials is well-known for its leading transistor manufacturing solutions, based on their systems' advanced technical capabilities and production-worthy hardware."

Applied Materials' SiNgen LPCVD chambers and RTP chambers with In Situ Steam Generation (ISSG) capability will be used to develop an inter-poly oxide-nitride-oxide (ONO) dielectric gate stack. This multi-chamber, single-wafer solution allows precise control across the wafer and repeatable results from wafer-to-wafer, enabling customers to fabricate a thin, uniform, ONO stack. Applied Materials' single-wafer thermal systems can also perform these key process steps in a matter of minutes, rather than hours required by a batch system, improving factory productivity.

The Applied Centura Radiance RTP is the industry's most successful RTP technology, with systems in virtually every major chip manufacturing facility in the world. 1st Silicon plans to use this system for both soak and spike anneals through at least two technology nodes to maintain precise control of dopant activation and electrical performance in transistor structures.

"We are pleased that 1st Silicon has chosen our systems for Malaysia's first 200mm production line," said Dr. Randhir Thakur, vice president and general manager of Applied Materials' Front End Products Group. "Applied Materials values the long term relationship we've had with 1st Silicon in supporting their niche strategies and we look forward to working with them in the future by continuing to provide the processing solutions that help enable their success."

1st Silicon is a dedicated semiconductor foundry founded in 1998 by the Malaysia State of Sarawak. 1st Silicon's 200mm wafer fab has a capacity in excess 45,000 wafers per month when fully ramped for process technologies ranging from 0.25 micron down to 0.13 micron. 1st Silicon's customers include integrated device manufacturers and fabless semiconductor companies from semiconductor companies worldwide. The company has its headquarters in Kuching, Sarawak, Malaysia and a US registered Subsidiary Corporation located in San Jose, California. 1st Silicon's homepage is at

Applied Materials, Inc. (Nasdaq:AMAT) is the largest supplier of equipment and services to the global semiconductor industry. Applied Materials' web site is

(1) LPCVD: low pressure chemical vapor deposition

(2) RTP: rapid thermal processing
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Publication:Business Wire
Geographic Code:1USA
Date:Jun 3, 2004
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