Watkins-Johnson to Exhibit 200/300-mm Cluster Platform, HDP and APCVD Process Modules at Semicon West.SAN FRANCISCO--(BUSINESS WIRE)--July 13, 1998--Watkins-Johnson Company's (NYSE NYSE See: New York Stock Exchange :WJ) Semiconductor Equipment Group is introducing its new 200/300-mm cluster platform, process modules for both high-density plasma and atmospheric-pressure CVD CVD Cardiovascular disease, see there and an enhanced continuous-process APCVD APCVD Atmospheric Pressure Chemical Vapor Deposition system at Semicon West, July 13-15 at Moscone Center, San Francisco. "We are pleased to be exhibiting our new WJ-3000 cluster platform," said Dr. Patrick J. Brady, president of Watkins-Johnson's Semiconductor Equipment Group. "This advanced platform serves as a `bridge' tool for semiconductor manufacturers undertaking the transition from 200-mm to 300-mm CVD processing. We are also introducing our WJ-1500 system, which incorporates the latest advances in WJ's proprietary continuous-process atmospheric-pressure deposition technology." WJ's booth features the WJ-3000 platform with two available process modules. The WJ-3300H is a scalable 200/300-mm high-density plasma (HDP) module that performs USG (UNIX Systems Group) The division within Novell that was responsible for UnixWare. See USL. , PSG PSG, n polysomnograph; polygraph performed during sleep. Physiological variables such as pulse, blood pressure, and respiration are monitored and charted. , VLK and passivation passivation the final stage in instrument manufacture, passing the finished instruments through a bath of nitric acid which removes foreign particles and promotes the formation of a protective coating of chromium oxide. processes with exceptional repeatability. The second module is the WJ-3300A APNext(TM) production-proven 200/300-mm product for BPSG and STI STI systolic time intervals. processes. The APNext(TM) atmospheric-pressure process module employs WJ's patented MonoBlok(TM) injector technology to achieve outstanding gap fill and thickness uniformity. The WJ-3000 cluster platform incorporates the ControlWORKS(TM) automated process-control system. A sophisticated graphical user interface graphical user interface (GUI) Computer display format that allows the user to select commands, call up files, start programs, and do other routine tasks by using a mouse to point to pictorial symbols (icons) or lists of menu choices on the screen as opposed to having to (GUI) keeps the operator continually informed about key process elements, such as material scheduling, wafer routing and recipe management. The platform may also be configured with the optional NOVA in-situ metrology feature which provides on-line film-uniformity measurement and feedback during operation. Watkins-Johnson's WJ-1500 is the company's newest 200-mm batch-process APCVD system offering exceptional uptime and film uniformity for the 0.18-micron generation of devices. The system achieves film uniformity of less than 1.5 percent, with all metals non-detect or below 2E10 atoms/cm2, and provides system availability of 85 percent. Watkins-Johnson Company, headquartered in Palo Alto, Calif., specializes in two high-technology business areas. The company's Semiconductor Equipment Group produces dielectric chemical-vapor-deposition systems for high-volume integrated-circuit manufacturing. WJ's wireless-communications units produce radio-frequency components and subassemblies for cellular and PCS networks worldwide. Sales in 1997 exceeded $291 million.
CONTACT: Watkins-Johnson Company
Frank E. Emery, 650/813-2752 (financial)
Stephen B. Witmer, 650/813-2417 (media)
Linda L. Johnson, 408/953-5685 (technology)
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