Vistec Selects Grant Bespoke Refrigeration Solution For E-Beam Nano-Lithography Machine.CAMBRIDGE, England -- Vistec Lithography (www.vistec-semi.com), a developer of electron beam lithography Using electron beams to create the mask patterns directly on a chip. The wavelength of an electron beam is only a few picometers compared to the 248 to 365 nanometer wavelengths of light used to create the traditional photomasks. systems for the worldwide semiconductor industry, has selected Grant Technologies (www.grant.co.uk), a designer and manufacturer of custom scientific and industrial solutions, to develop a bespoke be·spoke v. Past tense and a past participle of bespeak. adj. 1. Custom-made. Said especially of clothes. 2. Making or selling custom-made clothes: a bespoke tailor. refrigeration refrigeration, process for drawing heat from substances to lower their temperature, often for purposes of preservation. Refrigeration in its modern, portable form also depends on insulating materials that are thin yet effective. system to cool the lens, chamber and handling system within its VB300 electron beam A stream of electrons, or electricity, that is directed towards a receiving object. See electron beam imaging and electron beam lithography. nano-lithography machine. Engineers at Vistec Lithography's development facility in Cambridge, England, needed a high-precision refrigeration system for its new VB300 product to provide ultra stable (to 0.01C) temperature control within a range of 12 to 22C, flow rate 1 to 2 litres per minute, max pressure 2 to 3 bar and a cooling capacity of 250W. The equipment also needed to connect to a host computer over a DeviceNet to provide operators with real-time temperature monitoring and alarm outputs. Peter Goodall Peter Goodall (born 1949) is currently Acting Dean of Humanities at Macquarie University in the absence of Dean Christina Slade. His substantive position is Deputy Dean of Humanities and Acting Head of the Politics and International Relations Department. , manufacturing and quality production engineer at Vistec Lithography, said: "Grant's custom solution has exceeded our expectations. Their engineering team listened to our requirements and developed a well-engineered, extremely reliable temperature control system which is highly serviceable ser·vice·a·ble adj. 1. Ready for service; usable: serviceable equipment. 2. Able to give long service; durable: a heavy, serviceable fabric. and extremely cost-effective. Maintaining a stable water temperature is critical to controlling the accuracy of the electro-magnetic lens within the state-of-the-art VB300 system therefore we needed a supplier with a proven track record and substantial thermodynamics thermodynamics, branch of science concerned with the nature of heat and its conversion to mechanical, electric, and chemical energy. Historically, it grew out of efforts to construct more efficient heat engines—devices for extracting useful work from expanding expertise." Vistec Lithography's VB300 electron beam system is designed for use in advanced production and R&D applications to create the ultra-fine images used in the semiconductor and nanotechnology industries. The system has the ability to load and fully expose substrates up to 300mm in diameter and mask plates up to 7 inches square with a lithographic lith·o·graph n. A print produced by lithography. tr.v. lith·o·graphed, lith·o·graph·ing, lith·o·graphs To produce by lithography. capability to the sub-10nm level. These applications are undertaken by customers for the development of the next generations of nano-devices and structures, at major semiconductor manufacturers, industrial R&D facilities, as well as at universities and other technology centres of excellence. "We were very impressed by Grant's solution and in particular their flexibility and speed of responsiveness," added Amin Javer, senior system design engineer at Vistec Lithography. "For example, we decided after the first system was delivered to add inline thermal detection capability. We discussed this with Grant's engineers and within a matter of weeks they proposed and implemented an innovative solution which fully met our brief - it was an incredibly quick turnaround." Grant Technologies designs and manufactures custom scientific and industrial solutions to meet its customers' application-specific requirements. Leveraging its 50-year heritage in heating and cooling, mixing and shaking, data logging (data) data logging - (data acquisition) Storing a series of measurements over time, usually from a sensor that converts a physical quantity such as temperature, pressure, relative humidity, light, resistance, current, power, speed, vibration into a voltage that is then converted and data acquisition, and extensive manufacturing expertise, the company has delivered successful solutions to hundreds of companies across a diverse range of industry sectors. For more information, please visit Grant's web site at www.grant.co.uk. Alternatively, telephone +44 (0) 1763 260811 or email technologysales@grant.co.uk. An extended version of this news release - along with accompanying photography - is available at: http://www.grant-technologies.com/News/ |
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