Verteq Ships Goldfinger into Asia for Copper/Low-k.Business Editors & High-Tech WritersSANTA ANA Santa Ana, city, El Salvador Santa Ana (sän'tä ä`nä), city (1993 pop. 129,873), W El Salvador. It is the second largest city in the country and the commercial and processing center for a sugarcane, coffee, and cattle region. , Calif.--(BUSINESS WIRE)--Oct. 9, 2002 Verteq Inc. today announced the shipment of a Goldfinger Mach2 single-wafer cleaning system to an Asian semiconductor research institute. The Goldfinger Mach2 dual-chamber cleaning system will be used for post-etch and post-ash cleans of copper dual damascene via and trench structures on 200mm wafers. The customer purchased the system for use at an R&D facility, and includes multi-solvent processing capability for evaluating multiple chemistries and low-k dielectrics to be used for sub-100nm devices. "Goldfinger's ability to effectively remove particles and debris from high-aspect, ratio-recessed features were key to Goldfinger's selection by this research customer," said Rich Wiley, vice president and general manager of Verteq's single wafer business unit. "It was also important to the customer that Goldfinger demonstrated cost-effective processing with the high-cost chemistries typically used in copper/low-k cleans." Verteq's integrated Sahara(TM) surface tension gradient gradient In mathematics, a differential operator applied to a three-dimensional vector-valued function to yield a vector whose three components are the partial derivatives of the function with respect to its three variables. The symbol for gradient is ∇. drying process was also a factor in the customer's decision to choose the Goldfinger system, Wiley added. The Goldfinger Mach2 features two process chambers, each with the patented Goldfinger megasonic cleaning Megasonic Cleaning is a type of Acoustic cleaning, related to Ultrasonic cleaning. It is a gentler cleaning mechanism, less likely to cause damage, and is currently used in wafer cleaning. and rinsing system and the Sahara surface tension gradient drying system. The Mach2 also includes twin load ports that are configurable, as are the process chambers, for either 200mm or 300mm wafer applications. The system has a compact enclosure footprint of only 24 square feet, and typically processes 100 wafers per hour. Verteq Background Verteq is a leading supplier of advanced wafer cleaning solutions for single-wafer and batch applications. The company's Goldfinger(TM) single-wafer, megasonic-based technology enhances yields with the removal of etch To create a design in a material by digging out the material. The circuit designs on printed circuit boards and chips are etched by acid. See chip and printed circuit board. , ash and deposition debris from recessed re·cess n. 1. a. A temporary cessation of the customary activities of an engagement, occupation, or pursuit. b. The period of such cessation. See Synonyms at pause. 2. surfaces without damage to sensitive materials or features of 130nm to 70nm IC devices. The Cobra VcS(TM), Sunburst Turbo(TM) and SuperClean(TM) batch wafer products offer proven performance and quality for numerous cleaning , rinsing and drying applications. Utilizing leading-edge process and equipment technologies, Verteq is providing the highest levels of wafer cleanliness Cleanliness See also Orderliness. Cleverness (See CUNNING.) Berchta unkempt herself, demands cleanliness from others, especially children. [Ger. Folklore: Leach, 137] cat continually “washes” itself. and manufacturing productivity for applications such as trench and via, aluminum line, gate stack and bit line, pre-diffusion, post-CMP, initial and monitor wafer cleans. In combining process expertise, equipment ingenuity and worldwide service support, Verteq is a valuable resource to both end-users and OEMs looking for Looking for In the context of general equities, this describing a buy interest in which a dealer is asked to offer stock, often involving a capital commitment. Antithesis of in touch with. a competitive advantage through wafer cleaning performance. Verteq has headquarters in Santa Ana and maintains sales and service locations throughout North America North America, third largest continent (1990 est. pop. 365,000,000), c.9,400,000 sq mi (24,346,000 sq km), the northern of the two continents of the Western Hemisphere. , Europe and Asia. |
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