VARIAN SEMICONDUCTOR GETS CONTROL SYSTEM PATENT.

Varian Semiconductor Equipment Associates, Inc. (Nasdaq: VSEA), Gloucester, Mass., a supplier of ion implantation systems, has been issued U.S. Patent Number 6,374,144 for a "Method and Apparatus for Controlling a System Using Hierarchical State Machines."

The patent covers Varian Semiconductor's control system, known as VCS, for VIISta ion implantation systems.

The Varian Control System (VCS) executes, monitors, controls and records the state of many independent operations utilizing the VIISta single wafer ion implantation platform in order to ensure high quality implanter performance in semiconductor manufacturing facilities. VCS also enables e-diagnostic capabilities where the ion implanters in the field can communicate data back to Varian Semiconductor's manufacturing facility and also enables remote control and testing of field systems by VSEA experts.

Alan Sheng, Ph.D., Varian Semiconductor's vice president of engineering, commented, "The Varian Control System is another example of our ongoing research and development efforts to improve our customers costs of ownership advantages. The e-diagnostics capability of VCS improves maintenance efficiency, equipment effectiveness, process results and fab productivity."

About Varian Semiconductor

Varian Semiconductor Equipment Associates is the leading producer of ion implantation equipment used in the manufacture of semiconductors. The company is headquartered in Gloucester, Massachusetts, and operates worldwide.

For more information, call 978/282-2007 or visit http://www.vsea.com.