Unit Instruments' DeviceNet Mass Flow Controllers First to Meet Full ODVA Standards.

YORBA LINDA, Calif.--(BUSINESS WIRE)--Oct. 28, 1997--Unit Instruments Inc., a leading supplier of process gas delivery solutions for the semiconductor industry, Tuesday announced that its DeviceNet digital mass flow controllers (MFCs) have met the requirements for full certification by the Open DeviceNet Vendors Association (ODVA).

The Model 1665 DeviceNet Digital Metal Z-Seal High Purity MFC and Model 8165 DeviceNet Digital Metal Z-Seal Ultra High Purity MFC, which were introduced earlier this year, are the only digital MFCs currently on the market that meet full ODVA compliance standards.

DeviceNet is based on a popular and widely utilized communications protocol -- the Controller Area Network (CAN), and has been adopted by the world's largest semiconductor process tool maker. The DeviceNet open network standard eliminates the need for hardwiring and provides low-cost connectivity between devices and device-level diagnostics. In addition, vendors are not required to purchase proprietary hardware, software or licensing rights to connect devices to a system.

"As the only digital MFCs that are fully ODVA compliant, the Models 1665 and 8165 are the optimum solutions for corrosive gas processes that require high or ultra high purity metal-sealed MFCs in a networked environment," said Gina Sur, product manager at Unit.

True setpoint accuracy is available at +/- 1 percent setpoint at +/- 3 sigma limits in both models, which have a projected Weibull characteristic life of greater than 350,000 hours MTBF. They are available for applications with flows of 5 sccm to 30 slm. Both models have a high leak integrity of 1 x 10E-10 provided by the patented metal Z-Seals.

Unit Instruments, located in Yorba Linda, is a leading manufacturer of mass flow controllers and other process fluid delivery equipment. Founded in 1980, Unit Instruments also manufactures computerized calibration systems, digital power supplies, digital mass flow controllers, meters, pressure controllers, ultra high purity gas panels and gas isolation boxes.

Unit Instruments, with major operating subsidiaries in Japan, Korea and Ireland, and service centers in all of the major semiconductor manufacturing regions of the world, is publicly held and listed on the NASDAQ stock market under the symbol UNII. Unit can be contacted at http://www.unit.com for online product information and application support. -0-

DeviceNet is a trademark of the Open DeviceNet Vendors Association.

CONTACT: Unit Instruments Inc., Yorba Linda

Larry Gaines, 714/921-2640

Fax: [phone]

or

The Schraff Group

Anita Price, 714/833-3400

Fax: [phone]