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Unaxis Launches VERSALINE and LLS EVO II Tools for Packaging, Compound Semi, Deposition, and Etch Applications.


ST. PETERSBURG, Fla. -- Unaxis Wafer Processing introduces the VERSALINE(TM) and the LLS LLS Leukemia & Lymphoma Society
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 EVO II, the newest production tools in the Unaxis family of high performance wafer processing equipment.

The VERSALINE, a modular system enabling etching and deposition technologies is easily customized to specific applications and budgets without compromising performance. Built on a decade of industry leading dry etching system experience, the VERSALINE's specialized ICP (1) (Internet Cache Protocol) A protocol used by one proxy server to query another for a cached Web page without having to go to the Internet to retrieve it. See CARP and proxy server. , RIE, PECVD PECVD Plasma-Enhanced Chemical Vapor Deposition  and PVD PVD
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 modules provide advanced solutions for applications including LEDs, HBTs, HEMTs, optoelectronics, and MEMS (MicroElectroMechanical Systems) Tiny mechanical devices that are built onto semiconductor chips and are measured in micrometers. In the research labs since the 1980s, MEMS devices began to materialize as commercial products in the mid-1990s. .

The LLS EVO II, a state-of-the-art batch sputtering system, provides optimum process flexibility with five sources each configurable for sputtering options including DC, RF, RF/DC RF/DC Radio Frequency / Data Communication , pulsed DC, and co-sputtering. Simple to operate and easy to maintain, the LLS EVO II delivers excellent film uniformity and reproducibility.

Paul Henry, VP of Unaxis Wafer Processing Sales & Marketing states, "the VERSALINE responds to customer needs with the highest levels of technology on a cost effective, flexible platform which satisfies R&D and production requirements. Although new, the VERSALINE's substantial order backlog indicates clear market acceptance of this versatile product offering." Paul continues, "Both the LLS EVO II and VERSALINE systems are another step by Unaxis Wafer Processing towards better solutions for our customers in advanced packaging, MEMS, compound semiconductor, optical IC, and integrated passive device applications."

About Unaxis Wafer Processing

Unaxis Wafer Processing offers innovative production solutions for deposition and etch. These solutions allow production of leading edge chips, devices and components used in PCs, telecommunication and the automotive industry. Close cooperation with key customers and suppliers allows Unaxis to stay at the forefront of technology.

Unaxis Wafer Processing has developed a leading market position in each of its served markets which include: Advanced Packaging, Advanced Silicon, Photomask Etching and Compound Semi & Microtechnology Microtechnology is technology with features near one micrometre (one millionth of a metre, or 10-6 metre, or 1μm).

In the 1960s, scientists learned that by arraying large numbers of microscopic transistors on a single chip, microelectronic circuits could be
. The Company has a worldwide infrastructure, providing customer support and training through two technology centers and over 40 sales, service and spare parts centers.

Unaxis Wafer Processing is a Division of Unaxis (SWX:UNAX), a global leading provider of production systems, components and services for select growth segments of the information technology market, as well as for sophisticated industrial applications. Unaxis' commercial activities are conducted via its five segments: Semiconductor Equipment, Data Storage Solutions, Coating Services, Vacuum Solutions, and Components and Special Systems. Unaxis employs approximately 6,500 personnel and achieved sales of CHF CHF

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The currency market, also known as the Foreign Exchange market, is the largest financial market in the world, with a daily average volume of over US $1 trillion.
 1,610 million in 2003.
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Publication:Business Wire
Date:Jul 12, 2004
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