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Ultratech Stepper Chooses Technical Manufacturing Corporation -TMC- for Advanced Vibration Control.


Business Editors/High-Tech Writers

PEABODY, Mass.--(BUSINESS WIRE)--Feb. 7, 2003

Technical Manufacturing Corporation (TMC TMC Technology Marketing Corporation (Norwalk, Connecticut)
TMC Texas Medical Center (Houston, TX)
TMC Traffic Message Channel
TMC The Movie Channel
TMC Traffic Management Center
) has announced that Ultratech Stepper step·per  
n.
1. One that steps, especially in a fast or spirited manner.

2. Informal A dancer.

Noun 1.
, Inc. has chosen TMC's Electro-Damp(R) II Active Vibration Control Active vibration control is the active application of force in an equal and opposite fashion to the forces imposed by external vibration. With this application, a precision industrial process can be maintained on a platform essentially vibration-free.  System as the new platform for its 200 and 300 mm Saturn Spectrum and Titan Wafer Stepper family.

"We are extremely pleased to be partnered with Ultratech for their vibration control and stage feedforward feedforward /feed-for·ward/ (fed-for´ward) the anticipatory effect that one intermediate in a metabolic or endocrine control system exerts on another intermediate further along in the pathway; such effect may be positive or negative.  cancellation requirements," said Ulf Heide, President of TMC. "At TMC, we have been providing advanced vibration control solutions to stepper companies for over 20 years. Over that time, there has been an incredible growth in the needs of our customers and the sophistication so·phis·ti·cate  
v. so·phis·ti·cat·ed, so·phis·ti·cat·ing, so·phis·ti·cates

v.tr.
1. To cause to become less natural, especially to make less naive and more worldly.

2.
 of our solutions."

Ultratech plans to incorporate Electro-Damp(R) II into its steppers for semiconductor, advanced packaging, microlithography, nanotechnology, and optical networking applications.

Each patented Electro-Damp(R) II system will include TMC's DC-2000 digital controller, non-contacting electronic valving system, Gimbal Piston(TM) isolator, and high force linear motors. The isolation system will be incorporated into a highly engineered frame, also made by TMC, which will be the foundation of the tool.

"We are very pleased to see that our technology, manufacturing capabilities, and products are such a perfect match for Ultratech," said Steve Ryan, V.P., Marketing, of TMC. "Steppers have consistently offered the greatest challenge to precision vibration control of any application we face. Electro-Damp(R) II uses stage feedforward cancellation as well as active feedback to provide the low frequency vibration cancellation and fast settling time of stage-induced motion demanded by a state-of-the-art stepper."

TMC is a unique blend of dual core capabilities - unparalleled expertise in precision floor vibration control and a commitment to manufacturing using advanced precision metal fabrication fabrication (fab´rikā´shn),
n the construction or making of a restoration.
 techniques. The ISO-certified company's industry-standard product line includes STACIS(R) piezoelectric The property of certain crystals that causes them to produce voltage when a mechanical pressure is applied to them such as sound vibrations. This technique is used to build crystal microphones, phonograph cartridges and strain gauges, all of which turn mechanical movement into voltage.  active vibration isolation systems; Electro-Damp(R) pneumatic/linear motor-based active vibration isolation systems; CleanTop(TM) II optical tables and breadboards; Gimbal Piston(TM) pneumatic vibration isolation systems; Quiet Island(TM) sub-floor platforms for cleanroom raised floors; state-of-the-art active isolators; laboratory tables; and OEM (Original Equipment Manufacturer) The rebranding of equipment and selling it. The term initially referred to the company that made the products (the "original" manufacturer), but eventually became widely used to refer to the organization that buys the products and  isolator designs and acoustic enclosures. Standard and custom configurations plus a broad array of accessories are available.

STACIS and Electro-Damp are registered trademarks and CleanTop, Gimbal Piston and Quiet Island are trademarks of Technical Manufacturing Corporation.
COPYRIGHT 2003 Business Wire
No portion of this article can be reproduced without the express written permission from the copyright holder.
Copyright 2003, Gale Group. All rights reserved. Gale Group is a Thomson Corporation Company.

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Publication:Business Wire
Geographic Code:1USA
Date:Feb 7, 2003
Words:369
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