Trikon Etches World's Smallest Contact Holes Using M0RI Etcher.NEWPORT, United Kingdom--(BUSINESS WIRE)--June 17, 1999-- International SEMATECH SEMATECH Semiconductor Manufacturing Technology Presented to Its Member Companies On June 15 1999 the Results of a Development Project That Demonstrated for the First Time the Definition and Etching of Very Small Contact Holes in Oxide Down to 30nm (300A) in Size. Trikon Technologies, Inc. (OTC OTC See: Over-the-counter. OTC See over-the-counter market (OTC). BB:TRKN) announced today that, as part of a cooperation with the Resist Test Center at International SEMATECH in Austin, Texas (USA), Trikon Technologies Inc., Infineon Corporate Research, and Clariant GmbH have developed an enabling technology for definition and etching of the very small contact holes required for future advanced devices. Trikon's Omega(R) etchers were used. An ICP (1) (Internet Cache Protocol) A protocol used by one proxy server to query another for a cached Web page without having to go to the Internet to retrieve it. See CARP and proxy server. high density plasma chamber dry developed the advanced 193nm photoresist. A M0RI(TM) chamber was used to etch 30nm contact holes as deep as 633nm in PETEOS PETEOS Plasma Enhanced Tetraethylorthosilicate oxide. This is enabling for all currently predicted technology nodes and far smaller than 140nm contact holes required in year 2002 for the 130nm technology node currently predicted by the Semiconductor Industry Association. Infineon Technologies developed the advanced deepUV/193nm CARL(TM) photoresist system including a unique chemical biasing step for definition of very small trenches and contact holes. Photolithography was performed on a 0.60 NA 193nm microstepper using a standard binary contact hole reticle. Clariant GmbH will commercialize the CARL(TM) photoresist in the third quarter of 1999. Trikon provides a broad line of advanced manufacturing systems used for three of the major processing steps in the manufacture of a semiconductor device; physical vapor deposition  This article or section is in need of attention from an expert on the subject.Please help recruit one or [ improve this article] yourself. See the talk page for details. (PVD PVD abbr. peripheral vascular disease PVD Peripheral vascular disease, see there ), chemical vapor deposition (CVD CVD Cardiovascular disease, see there ) and etch. Trikon's corporate headquarters and main manufacturing site are located in Newport, South Wales, United Kingdom with sales and service offices in the USA, Asia and Europe. Additional information about Trikon is available on the World Wide Web. Trikon's home page is located at http://www.trikon.com "Safe Harbor" Statement Under the Private Securities Litigation An action brought in court to enforce a particular right. The act or process of bringing a lawsuit in and of itself; a judicial contest; any dispute. When a person begins a civil lawsuit, the person enters into a process called litigation. Act of 1995: This press release contains certain forward looking statements. These statements are subject to various risks and uncertainties that could cause results to differ materially, including, but not limited to, semiconductor industry conditions and changes in technology. For other risks attendant to Trikon and the semiconductor manufacturing equipment industry, please see the Company's SEC reports, including, without limitation, its annual report on Form 10 K, quarterly reports on Form 10 Q and current reports on Form 8 K. |
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