Tokyo Electron (TEL) Introduces TELINDY(TM) IRad(TM) Plasma Enhanced CVD Reactor.TOKYO -- Tokyo Electron (TEL TEL Telephone TEL Telegram TEL Telugu (langauge) TEL Terrorist Exclusion List TEL Technology-Enhanced Learning TEL Transporter-Erector-Launcher TEL Tetra-Ethyl Lead TEL Team Deutsche Telekom ), a world leader in thermal processing systems, today announced that the company will release TELINDY IRad in April 2007 for high-volume manufacturing of advanced plasma-enhanced nitride films. TELINDY IRad is based on the design of the TELINDY batch reactor that has been in production for various applications since earlier this year. Plasma-enhanced chemical vapor deposition (PECVD PECVD Plasma-Enhanced Chemical Vapor Deposition ) processes are typically performed in single wafer reactors. The design of IRad challenges conventional wisdom by incorporating a plasma source in the reaction chamber of a multi-thermal CVD CVD Cardiovascular disease, see there system. Originally developed for the industry-proven TELFORMULA platform, IRad in-situ plasma source allows chemical reactions to proceed at the lower temperatures required for advanced sub 45nm processing. This technology has been incorporated into TEL's large batch platform, the TELINDY. Offering a 100-wafer load size, TELINDY IRad's unique reactor design provides an optimized hardware configuration that increases tool uptime by enabling both deposition and dry clean processing. Furthermore, combining IRad in-situ plasma source with TEL's MLD MLD median lethal dose; minimum lethal dose. MLD or mld abbr. minimal lethal dose MLD, n See dose, lethal, minimum. MLD minimum lethal dose. (molecular layer deposition) technology successfully produces stoichiometric stoi·chi·om·e·try n. 1. Calculation of the quantities of reactants and products in a chemical reaction. 2. The quantitative relationship between reactants and products in a chemical reaction. SiN films and variations thereof. TELINDY IRad also offers conformal deposition on features with aggressive A/R for advanced memory and logic structures that require precise control of stoichiometry stoichiometry Determination of the proportions (by weight or number of molecules) in which elements or compounds react with one another. The rules for determining stoichiometric relationships are based on the laws of conservation (see and uniformity. "With TELINDY IRad, TEL's Thermal Processing Systems business unit is demonstrating that leading-edge technology films and cost competitiveness can coexist in the same solution set," said Ken Sato, president of Tokyo Electron Limited. TEL continues to make breakthrough advancements in thermal processing technology through more efficient reactors that address the technical requirements faced by semiconductor manufacturers in their efforts to develop sub-45nm nodes. For more information about TELINDY IRad, please visit us at Semicon Japan at booth # 2D-1001. About TEL TEL, established in 1963, is a leading supplier of innovative semiconductor and FPD production equipment worldwide. In Japan, TEL also distributes computer network-related products and electronic components of global leading suppliers. To support this diverse product base, TEL is strategically located around the world. TEL is a publicly held company listed on the Tokyo Stock Exchange Tokyo Stock Exchange Main stock market of Japan, located in Tokyo. It opened in 1878 to provide a market for the trading of government bonds newly issued to former samurai. . www.tel.com |
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