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Tokyo Electron (TEL) Acquires Epion Corporation.


TOKYO -- Tokyo Electron (TEL TEL Telephone
TEL Telegram
TEL Telugu (langauge)
TEL Terrorist Exclusion List
TEL Technology-Enhanced Learning
TEL Transporter-Erector-Launcher
TEL Tetra-Ethyl Lead
TEL Team Deutsche Telekom
) (TOKYO:8035), the world's second largest supplier of semiconductor production equipment (SPE SPE - Software Practice and Experience ), today announced the company has acquired Epion Corporation, supplier of gas cluster ion beam Gas Cluster Ion Beams (GCIB) is a new technology for nano-scale modification of surfaces. It can smooth a wide variety of surface material types to within an angstrom of roughness without subsurface damage. It is also used to chemically alter surfaces through infusion or deposition.  (GCIB GCIB Gas Cluster Ion Beam
GCIB Global Corporate Investment Banking (Bank of America) 
) technology for diverse semiconductor applications and emerging nanotechnology markets.

Epion's GCIB is a highly versatile atomic-scale processing technique that is ideal for production applications where surface and film quality are crucial. Key applications for GCIB include etching, smoothing, doping doping, in electronics: see semiconductor.


Altering the electrical conductivity of a semiconductor material, such as silicon, by chemically combining it with foreign elements.
 and physical and chemical surface modification.

"As our customers continue to aggressively shrink geometries and adopt new materials and novel device structures, we believe Epion's unique technology will find its way into several high volume production applications," said Lou Steen, VP of Marketing for TEL US and newly-appointed president of TEL Epion. "We believe that TEL's worldwide service and support organizations will greatly enhance customer satisfaction of Epion's nFusion[TM] System and Ultra Trimmer[TM] products."

"Epion is very pleased to become part of TEL. We expect that TEL's position as a leading global supplier of semiconductor production equipment will accelerate customer acceptance of Epion technology," said Allen Kirkpatrick, Founder and CEO (1) (Chief Executive Officer) The highest individual in command of an organization. Typically the president of the company, the CEO reports to the Chairman of the Board.  of Epion.

"We believe that Epion's advanced process technology will truly be an asset to TEL's position in the semiconductor industry. We are eager to move forward in a collaborative effort with our customers and to integrate the benefits of Epion's unique gas ion beam technology," said Ken Sato, president of Tokyo Electron Limited.

About Epion Corporation

Epion Corporation is the world's only commercial developer of gas cluster ion beam (GCIB) technology and equipment for microelectronics and related manufacturing. GCIB has become a powerful and versatile atomic-scale processing technique that is able to produce important surface modification effects that are not possible using any other conventional techniques. Previously, Epion has sold GCIB systems to companies worldwide for enhancement of critical surfaces in devices used for data storage, optics and telecommunications. Epion has established considerable expertise and intellectual property surrounding its GCIB technology; it has more than 100 issued or pending patents worldwide covering approximately 30 different innovations.

About TEL

TEL, established in 1963, is a leading supplier of innovative semiconductor and FPD (1) (Flat Panel Display) See LCD, plasma display, EL display, FED and flat panel display.

(2) (Field Programmable Device) An umbrella term for all chips that can be programmed by the customer including SPLDs, CPLDs and FPGAs. See PLD.
 production equipment worldwide. In Japan, TEL also distributes computer network related products and electronic components of global leading suppliers. To support this diverse product base, TEL is strategically located around the world. TEL is a publicly held company listed on the Tokyo Stock Exchange Tokyo Stock Exchange

Main stock market of Japan, located in Tokyo. It opened in 1878 to provide a market for the trading of government bonds newly issued to former samurai.
. www.tel.com
COPYRIGHT 2007 Business Wire
No portion of this article can be reproduced without the express written permission from the copyright holder.
Copyright 2007, Gale Group. All rights reserved. Gale Group is a Thomson Corporation Company.

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Publication:Business Wire
Date:Jan 10, 2007
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