Tokyo Electron's TELINDY(TM) in Full Scale Production.AUSTIN, Texas -- Tokyo Electron (TEL TEL Telephone TEL Telegram TEL Telugu (langauge) TEL Terrorist Exclusion List TEL Technology-Enhanced Learning TEL Transporter-Erector-Launcher TEL Tetra-Ethyl Lead TEL Team Deutsche Telekom ), world-leader in thermal processing systems, announced today that the TELINDY is now in full-scale production at major IDMs. TEL's newest batch thermal reactor Noun 1. thermal reactor - a nuclear reactor in which nuclear fissions are caused by neutrons that are slowed down by a moderator nuclear reactor, reactor - (physics) any of several kinds of apparatus that maintain and control a nuclear reaction for the production addresses emerging trends and requirements for 65-nm technologies extending to 45nm and beyond. The TELINDY offers up to a 50% reduction in overhead time when compared to typical large batch platforms. This technology-enabling platform has been brought to mainstream through careful implementation of hardware elements that increase the productivity by almost 80%, thereby boosting the system's efficiency significantly. The TELINDY also achieves reduced CoO with a larger, 125-wafer load size and a comparably small footprint. TELINDY's unique reactor design enables sequential processing sequential processing - Running a single task to completion on a single processor, in contrast to parallel processing or multitasking. of multiple film stacks with field-proven in-situ clean capabilities, greatly improving tool availability and CoO for a set of films that may otherwise require processing on multiple toolsets. The TELINDY can process oxide, nitride nitride Any of a class of chemical compounds in which nitrogen is combined with an element of similar or lower electronegativity, such as boron, silicon, and most metals. Some examples of nitrides include boron nitride, calcium nitride, aluminum nitride, and cyanogen. and additional advanced films, such as LPRO (Low Pressure Radical Oxidation oxidation /ox·i·da·tion/ (ok?si-da´shun) the act of oxidizing or state of being oxidized.ox·idative ox·i·da·tion n. 1. The combination of a substance with oxygen. 2. ). "TELINDY offers a revolutionary platform that integrates the ability to process leading thermal applications with in-situ clean," said Hiroshi Takenaka, General Manager of TEL's Thermal Processing Business Unit. "Proven as a technology enabler, the TELINDY is rapidly being adopted into HVM HVM High Volume Manufacturing HVM Hardware Virtual Machine HVM High Velocity Missile HVM Hypervelocity Missile HVM Havre, Montana (border patrol sector) HVM High Velocity Machines by major IDMs." TEL continues to push the envelope of thermal processing capabilities through improved and more efficient reactors that address the technical requirements faced by semiconductor manufacturers in their efforts to develop sub-45nm nodes. |
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