Tegal Receives Order for 900 Series Etch Systems From ELMOS Semiconductor for Automotive ASIC Applications.Business Editors/High-Tech Writers PETALUMA, Calif.--(BUSINESS WIRE)--Aug. 13, 2001 Tegal Corp. (Nasdaq:TGAL TGAL Think Globally, Act Locally Tgal Thousand gallons ) today announced that ELMOS Semiconductor Elmos Semiconductor AG are a German manufacturer of semiconductor based system solutions. In April 2001, the company acquired Silicon Microstructures Inc, a producer and supplier of pressure sensors and microstructures. AG (NeuerMarkt Frankfurt: ELG ELG Early Learning Goals (education) ELG Export-Led Growth ELG Endoluminal Graft ELG Effluent Limitation Guideline ELG European Liaison Group ELG Executive Level Group ELG Engineering Log Generator ), a leading manufacturer of application specific integrated circuits Integrated circuits Miniature electronic circuits produced within and upon a single semiconductor crystal, usually silicon. Integrated circuits range in complexity from simple logic circuits and amplifiers, about 1/20 in. (1. (ASICs), has ordered two Tegal 901e diode plasma etch systems. The 901e systems will be used for nitride etching in the production of ASICs for the automotive industry at ELMOS' facility in Dortmund, Germany. Installation is scheduled for completion by October. "ELMOS has worked with Tegal for a decade. Tegal systems have consistently provided reliability and stability at a substantially lower cost of ownership than competing tools," said Holger Doring, module plasma manager at ELMOS. "The new Tegal 901e etch systems will enable us to optimize our manufacturing processes as we increase capacity at our facility." "This order from ELMOS demonstrates the strong service and performance reputation that Tegal has gained in the marketplace," said Jim McKibben, vice president of worldwide marketing and sales at Tegal. "Our robust 900 Series systems deliver low operating costs for high-productivity manufacturing. They provide production-proven flexibility and reliability as evidenced by this repeat order." Tegal's 900 Series systems are widely recognized for their low cost of ownership and high-throughput. More than 1,300 of the 900 Series systems have been installed worldwide and are supported by an extensive worldwide parts and service organization. The 900 Series systems deliver highly reliable, repeatable results in etching a variety of films used to manufacture semiconductor, telecommunications and optoelectronic devices, MEMS (MicroElectroMechanical Systems) Tiny mechanical devices that are built onto semiconductor chips and are measured in micrometers. In the research labs since the 1980s, MEMS devices began to materialize as commercial products in the mid-1990s. , flat panel displays and thin film magnetic heads. The system is designed around a production-proven transport system that can accommodate 75 mm to 150 mm round silicon and GaAs substrates. The transport can also be configured to accommodate rectangular substrates from 100 mm to 125 mm on a side. Typical applications include nitride etch, contact/via etch, photoresist descum, LOCOS nitride etch, zero layer etch, backside etch, isotropic Refers to properties that do not differ no matter which direction is measured. For example, an isotropic antenna radiates almost the same power in all directions. In practice, antennas cannot be 100% isotropic. oxide etch, non-critical polysilicon etch and titanium/tantalum alloy etch. About ELMOS Semiconductor AG ELMOS Semiconductor AG is a leading manufacturer of customer and application specific integrated circuits located in Dortmund, Germany. The company is specialized on Mixed-Signal and Smart-Power devices mainly for the automotive business (about 85% of net sales Net Sales The amount a seller receives from the buyer after costs associated with the sale are deducted. Notes: This amount is calculated by subtracting the following items from gross sales: merchandise returned for credit, allowances for damaged or missing goods, freight ). Specific to ELMOS is a unique High-Voltage CMOS (Complementary Metal Oxide Semiconductor) Pronounced "c-moss." The most widely used integrated circuit design. It is found in almost every electronic product from handheld devices to mainframes. technology that directly interfaces the car environment. Within the last years, ELMOS has realized a CAGR CAGR See: Compound Annual Growth Rate more than 25% with net sales reaching DM 207 million in the year 2000. More information is available on the Internet at www.elmos.de. About Tegal Corp. Tegal Corp., headquartered in Petaluma, is a leading designer and manufacturer of plasma etch systems used in the production of integrated circuits (ICs), opto-telecom devices, MEMS and other related microelectronics devices. Etching is a key selective material removal process and must be repeated multiple times in the production of these devices. Tegal markets and services its systems in all major IC producing regions of the world. Tegal was recently granted its fifth VLSI VLSI: see integrated circuit. (1) (Very Large Scale Integration) Between 100,000 and one million transistors on a chip. See SSI, MSI, LSI and ULSI. (2) (VLSI Technology, Inc., Tempe, AZ, www.semiconductors. Research, Inc. Ten BEST award in recognition of its superior customer support and service. More information is available on the Internet at www.tegal.com. Safe Harbor Safe Harbor 1. A legal provision to reduce or eliminate liability as long as good faith is demonstrated. 2. A form of shark repellent implemented by a target company acquiring a business that is so poorly regulated that the target itself is less attractive. Statement Except for historical information, the matters discussed in this news release are forward-looking statements. Such forward-looking statements are subject to certain risks and uncertainties including, but not limited to industry conditions, economic conditions, acceptance of new technologies, the growth of the wireless market, as well as other risks set forth in the Company's periodic filings with the Securities and Exchange Commission. |
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