Tegal Receives Order for 900 Series Etch System from Australian MEMS Manufacturer.Business Editors/High-Tech Writers PETALUMA, Calif.--(BUSINESS WIRE)--Oct. 1, 2003 Tegal Corporation (Nasdaq:TGAL TGAL Think Globally, Act Locally Tgal Thousand gallons ) today announced the sale of a 903e diode plasma etch system to a MEMS (MicroElectroMechanical Systems) Tiny mechanical devices that are built onto semiconductor chips and are measured in micrometers. In the research labs since the 1980s, MEMS devices began to materialize as commercial products in the mid-1990s. manufacturer located in Australia. The 900 Series tool will be used for etching silicon devices in the production of high efficiency photovoltaic The generation of voltage by a material that is exposed to light in the visible and invisible ranges. See photoelectric and photovoltaic cell. solar cells. Tegal technical support, development and global service infrastructure were keys to winning the contract. "Tegal is willing to listen to customers with non-traditional applications for plasma etching," said Jim McKibben, Tegal's vice president of worldwide marketing and sales. "Emerging technologies in renewable energy require new thinking and a fresh approach to problem solving problem solving Process involved in finding a solution to a problem. Many animals routinely solve problems of locomotion, food finding, and shelter through trial and error. ." The sale includes both process development in the Tegal lab facility in California, as well as customized material handling hardware to support the unique MEMS devices. Tegal was recently ranked, for the second straight year, as the No. 1 semiconductor equipment supplier by the VLSI VLSI: see integrated circuit. (1) (Very Large Scale Integration) Between 100,000 and one million transistors on a chip. See SSI, MSI, LSI and ULSI. (2) (VLSI Technology, Inc., Tempe, AZ, www.semiconductors. Research Inc 10 BEST Survey, an annual survey ranking customer satisfaction. The customer-based honor clearly reflects Tegal's unwavering focus on customer success, not just customer service. Tegal's 900 Series systems are widely recognized for their low cost of ownership and high throughput. More than 1,500 of the 900 Series systems have been installed worldwide and are supported by Tegal's extensive worldwide field process and service organization. 900 Series systems deliver highly reliable, repeatable results in etching a variety of films used to manufacture MEMS, silicon ICs, telecommunications and optoelectronics devices, flat panel displays and thin film magnetic heads. The 901e system is designed around a production-proven wafer transport design that can accommodate 75 mm to 150 mm round silicon, GaAs, InP, and dielectric material substrates. The transport can also be configured to accommodate rectangular substrates up to 150 mm on a side. Typical applications for the 901e include nitride etch, photoresist descum, polyimide Pronounced "poly-ih-mid." A type of plastic (a synthetic polymeric resin) originally developed by DuPont that is very durable, easy to machine and can handle very high temperatures. Polyimide is also highly insulative and does not contaminate its surroundings (does not outgas). and BCB BCB Banco Central do Brasil (Brazil's central bank) BCB Borland C++ Builder BCB Bangladesh Cricket Board BCB Benzocyclobutene (low loss dielectric substrate) BCB Bumiputra-Commerce Bank BCB Broadcast Band etches, zero layer etch, backside etch, isotropic Refers to properties that do not differ no matter which direction is measured. For example, an isotropic antenna radiates almost the same power in all directions. In practice, antennas cannot be 100% isotropic. oxide etch, non-critical polysilicon etch and titanium/tantalum alloy etch. Safe Harbor Safe Harbor 1. A legal provision to reduce or eliminate liability as long as good faith is demonstrated. 2. A form of shark repellent implemented by a target company acquiring a business that is so poorly regulated that the target itself is less attractive. Statement The statements in this news release are forward-looking statements that involve a number of risks and uncertainties. As discussed in Tegal's annual report on Form 10-K Form 10-K A report required by the SEC from exchange-listed companies that provides for annual disclosure of certain financial information. Form 10-K See 10-K. for the fiscal year ended March 31, 2003, assumptions relating to the foregoing involve judgments with respect to, among other things, the ability of Tegal to successfully implement its business strategy; future economic, competitive and market conditions, including those in Europe and Asia and those related to Tegal's strategic markets; whether the products offered by Tegal will continue to achieve customer acceptance, and future business decisions, all of which are difficult or impossible to predict accurately and many of which are beyond the control of Tegal. Although Tegal believes that the assumptions underlying the forward-looking statements are reasonable, any of the assumptions could prove inaccurate and, therefore, there can be no assurance that the results contemplated in the forward-looking statements will be realized. In light of the significant uncertainties inherent in the forward-looking information included herein, the inclusion of such information should not be regarded as a representation by Tegal or any other person that Tegal's objectives or plans will be realized. Tegal undertakes no obligation to revise the forward-looking statements contained herein to reflect such events or circumstances after the date hereof or to reflect the occurrence of unanticipated events. About Tegal Tegal Corporation, headquartered in Petaluma, California, is a leading designer and manufacturer of plasma etch and deposition systems used in the production of MEMS, smart cards, opto-telecom devices, integrated circuits (ICs), Radio Frequency Identification See RFID. Devices (RFID's) and other related microelectronics devices. Both etching and deposition are key process steps and must be repeated multiple times in the production of these devices. Tegal markets and services its systems in all major IC-producing regions of the world. More information is available on the Internet at: www.tegal.com. |
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