Tegal Receives Order for 900 Series Etch System From Leading Process Instrumentation Provider.Business Editors/High-Tech Writers PETALUMA, Calif.--(BUSINESS WIRE)--Jan. 30, 2002 Tegal Corporation (Nasdaq:TGAL TGAL Think Globally, Act Locally Tgal Thousand gallons ) today announced a leading global designer and manufacturer of process instrumentation products has placed an order for a Tegal 901e diode plasma etch system that will be used for etching polysilicon in the production of pressure sensors. The 900 Series system is scheduled for installation in February 2002 at the customer's North American North American named after North America. North American blastomycosis see North American blastomycosis. North American cattle tick see boophilusannulatus. facility. "The Tegal 901e continues to gain marketshare in new industry arenas, such as process instrumentation. Our 900 Series etch systems provide users with production-proven reliability and flexibility at a lower operating cost, giving this new customer both stability and a strategic competitive edge in etch processing," said Jim McKibben, vice president of worldwide marketing and sales for Tegal. Tegal's 900 Series systems are widely recognized for their low cost of ownership and high-throughput. More than 1,300 of the 900 Series systems have been installed worldwide and are supported by an extensive worldwide parts and service organization. The 900 Series systems deliver highly reliable, repeatable results in etching a variety of films used to manufacture semiconductor, telecommunications and optoelectronics devices, flat panel displays A thin display screen for computer and TV usage. The first flat panels appeared on laptop computers in the mid-1980s, and the LCD technology became the standard. Stand-alone LCD screens became available for desktop computers in the mid-1990s and exceeded sales of CRTs for the first time and thin film magnetic heads. The system is designed around a production-proven transport system that can accommodate 75 mm to 150 mm round silicon and GaAs substrates. The transport can also be configured to accommodate rectangular substrates from 100 mm to 125 mm on a side. Typical applications include nitride nitride Any of a class of chemical compounds in which nitrogen is combined with an element of similar or lower electronegativity, such as boron, silicon, and most metals. Some examples of nitrides include boron nitride, calcium nitride, aluminum nitride, and cyanogen. etch, contact/via etch, photoresist descum, LOCOS nitride etch, zero layer etch, backside etch, isotropic Refers to properties that do not differ no matter which direction is measured. For example, an isotropic antenna radiates almost the same power in all directions. In practice, antennas cannot be 100% isotropic. oxide etch, non-critical polysilicon etch and titanium/tantalum alloy etch. About Tegal Corporation Tegal Corporation, headquartered in Petaluma, Calif., is a leading designer and manufacturer of plasma etch systems used in the production of opto-telecom devices, integrated circuits Integrated circuits Miniature electronic circuits produced within and upon a single semiconductor crystal, usually silicon. Integrated circuits range in complexity from simple logic circuits and amplifiers, about 1/20 in. (1. (ICs) and other related microelectronics devices. Etching is a key process and must be repeated multiple times in the production of these devices. Tegal markets and services its systems in all major IC-producing regions of the world. Tegal was recently granted its fifth VLSI VLSI: see integrated circuit. (1) (Very Large Scale Integration) Between 100,000 and one million transistors on a chip. See SSI, MSI, LSI and ULSI. (2) (VLSI Technology, Inc., Tempe, AZ, www.semiconductors. Research, Inc Ten BEST award in recognition of its superior customer support and service. More information is available on the Internet at www.tegal.com. Safe Harbor Safe Harbor 1. A legal provision to reduce or eliminate liability as long as good faith is demonstrated. 2. A form of shark repellent implemented by a target company acquiring a business that is so poorly regulated that the target itself is less attractive. Statement Except for historical information, the matters discussed in this news release are forward-looking statements. Such forward-looking statements are subject to certain risks and uncertainties including, but not limited to industry conditions, economic conditions, acceptance of new technologies, the growth of the wireless market, as well as other risks set forth in the Company's periodic filings with the Securities and Exchange Commission. |
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