Tegal Receives Order for 900 Series Etch System From Leading French University for Advancing Next Generation Devices.Business Editors/High-Tech Writers PETALUMA, Calif.--(BUSINESS WIRE)--March 18, 2002 Tegal Corporation (Nasdaq:TGAL TGAL Think Globally, Act Locally Tgal Thousand gallons ) today announced that a major French university has placed an order for a Tegal 901e diode plasma etch To create a design in a material by digging out the material. The circuit designs on printed circuit boards and chips are etched by acid. See chip and printed circuit board. system. The university plans to install the 900 Series system later this month at the French semiconductor fabrication fabrication (fab´rikā´sh  n),n the construction or making of a restoration. facility of an existing Tegal customer. The system will be used for advancing TaN and Si3N4 etching by the university. "The Tegal 901e continues to win new customers with its production-proven reliability, flexibility and a lower operating cost than competing solutions," said Jim McKibben, Tegal's vice president of worldwide marketing and sales. "The university selected our 900 Series etch system specifically for its performance and reliability, as well as the high-level of after-sale support, in an effort to maximize productivity while minimizing costs." This was the French university's first order from Tegal, and the purchase extends Tegal's 15-year long relationship with the IC manufacturer. More than 1,300 of the 900 Series systems have been installed worldwide. The systems are widely recognized for their low cost of ownership and high-throughput, and are supported by an extensive worldwide parts and service organization. The 900 Series systems deliver highly reliable, repeatable results in etching a variety of films used to manufacture semiconductor, telecommunications and optoelectronics devices, flat panel displays A thin display screen for computer and TV usage. The first flat panels appeared on laptop computers in the mid-1980s, and the LCD technology became the standard. Stand-alone LCD screens became available for desktop computers in the mid-1990s and exceeded sales of CRTs for the first time and thin film magnetic heads. The system is designed around a production-proven transport system that can accommodate 75 mm to 150 mm round silicon and GaAs substrates. The transport can also be configured to accommodate rectangular substrates from 100 mm to 125 mm on a side. Typical applications include nitride nitride Any of a class of chemical compounds in which nitrogen is combined with an element of similar or lower electronegativity, such as boron, silicon, and most metals. Some examples of nitrides include boron nitride, calcium nitride, aluminum nitride, and cyanogen. etch, contact/via etch, photoresist A film used in photolithography that temporarily holds the pattern of a circuit path or microscopic element of a chip. When exposed to light, it hardens and is resistant to the acid bath that washes away the unexposed areas. Not to be confused with photoresistor. descum, LOCOS nitride etch, zero layer etch, backside etch, non-critical polysilicon etch and titanium/tantalum alloy etch. About Tegal Corporation Tegal Corporation, headquartered in Petaluma, Calif., is a leading designer and manufacturer of plasma etch systems used in the production of opto-telecom devices, integrated circuits Integrated circuits Miniature electronic circuits produced within and upon a single semiconductor crystal, usually silicon. Integrated circuits range in complexity from simple logic circuits and amplifiers, about 1/20 in. (1. (ICs) and other related microelectronics devices. Etching is a key process and must be repeated multiple times in the production of these devices. Tegal markets and services its systems in all major IC-producing regions of the world. Tegal was recently granted its fifth VLSI VLSI: see integrated circuit. (1) (Very Large Scale Integration) Between 100,000 and one million transistors on a chip. See SSI, MSI, LSI and ULSI. (2) (VLSI Technology, Inc., Tempe, AZ, www.semiconductors. Research, Inc Ten BEST award in recognition of its superior customer support and service. More information is available on the Internet at www.tegal.com. Safe Harbor Safe Harbor 1. A legal provision to reduce or eliminate liability as long as good faith is demonstrated. 2. A form of shark repellent implemented by a target company acquiring a business that is so poorly regulated that the target itself is less attractive. Statement Except for historical information, the matters discussed in this news release are forward-looking statements as they relate to Tegal's ability to expand its customer base. Such forward-looking statements are subject to certain risks and uncertainties including, but not limited to industry conditions, economic conditions, acceptance of new technologies, the growth of the wireless market, as well as other risks set forth in the Company's periodic filings with the Securities and Exchange Commission. |
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