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Tegal Receives Order for 6500 Advanced Etch System From Skyworks Solutions, Inc.


Global Wireless Device Leader Selects Tegal for Development and Production of Advanced Wireless Devices for Mobile Connectivity

SAN JOSE San Jose, city, United States
San Jose (sănəzā`, săn hōzā`), city (1990 pop. 782,248), seat of Santa Clara co., W central Calif.; founded 1777, inc. 1850.
, Calif. -- Tegal Corporation (Nasdaq:TGAL TGAL Think Globally, Act Locally
Tgal Thousand gallons
), a leading designer and manufacturer of plasma etch and deposition systems used in the production of integrated circuits Integrated circuits

Miniature electronic circuits produced within and upon a single semiconductor crystal, usually silicon. Integrated circuits range in complexity from simple logic circuits and amplifiers, about 1/20 in. (1.
 and nanotechnology devices, today announced that it had received an order for an 6500 Advanced Etch cluster tool from Skyworks Solutions This article or section is written like an .
Please help [ rewrite this article] from a neutral point of view.
Mark blatant advertising for , using .
 Inc. The system will be shipped to Skyworks' fab in Southern California Southern California, also colloquially known as SoCal, is the southern portion of the U.S. state of California. Centered on the cities of Los Angeles and San Diego, Southern California is home to nearly 24 million people and is the nation's second most populated region,  and will be used to etch SiN and other critical thin-films on GaAs substrates. The devices produced on the 6500 system will be incorporated in a wide variety of wireless handset, automotive, broadband, cellular infrastructure, industrial and medical applications.

"The 6500 Advanced Etch system was selected on the basis of the unique capabilities of our innovative HRe(-) (High-density Reflected electron) source," said Thomas Mika, President & CEO (1) (Chief Executive Officer) The highest individual in command of an organization. Typically the president of the company, the CEO reports to the Chairman of the Board.  of Tegal Corporation. "A key focus area for our company is the compound semiconductor space, which is seeing renewed growth due to the ubiquitous usage of wireless electronics."

"The HRe(-) chamber enables us to etch films on GaAs substrates at a low temperature with suitable etch rate, etch profile and selectivity to mask and under-layer," said Dr. Nercy Ebrahimi, Director of Process Technology at Skyworks. "These etch characteristics are important for us to manufacture our advanced wireless devices that enable mobile connectivity through semiconductor innovation."

The 6500 etch system is a state-of the-art, high-vacuum etch cluster tool and is used in production fabs to etch multiple thin films in an extremely clean process environment. These films are widely used in compound semiconductor & opto-electronics, non-volatile memory Refers to memory chips that hold their content without power being applied. It may refer to chips that are not changeable, such as ROMs and PROMs, or to chips that can be rewritten many times such as flash memory. , analog & power devices and MEMS (MicroElectroMechanical Systems) Tiny mechanical devices that are built onto semiconductor chips and are measured in micrometers. In the research labs since the 1980s, MEMS devices began to materialize as commercial products in the mid-1990s.  devices. The 6500 system has an easy-to-use GUI (Graphical User Interface) A graphics-based user interface that incorporates movable windows, icons and a mouse. The ability to resize application windows and change style and size of fonts are the significant advantages of a GUI vs. a character-based interface. , SECS/GEM communication and flexible wafer shape and size handling capability that makes it ideal for production environments. Optional integrated plasma strip and rinse chambers, electro-static chucks with a wide temperature range, plasma emission diode array end-point detection and active wafer temperature monitoring and control are available to etch many different dielectric and conductive films used in semiconductor and other electronic device production.

Safe Harbor Safe Harbor

1. A legal provision to reduce or eliminate liability as long as good faith is demonstrated.

2. A form of shark repellent implemented by a target company acquiring a business that is so poorly regulated that the target itself is less attractive.
 Statement

Except for historical information, matters discussed in this news release contain forward-looking statements within the meaning of Section 27A of the Securities Act and Section 21E of the Exchange Act. Forward-looking statements, which are based on assumptions and describe our future plans, strategies and expectations, are generally identifiable by the use of the words "anticipate," "believe," "estimate," "expect," "intend," "project" or similar expressions. These forward-looking statements are subject to risks, uncertainties and assumptions about the Company including, but not limited to industry conditions, economic conditions, acceptance of new technologies and market acceptance of the Company's products and services. All forward-looking statements attributable to us or persons acting on our behalf are expressly qualified in their entirety by the cautionary statements in this paragraph. For a further discussion of these risks and uncertainties, please refer to the Company's periodic filings with the Securities and Exchange Commission.

About Tegal

Tegal provides process and equipment solutions to leading edge suppliers of advanced semiconductor and nanotechnology devices. Incorporating unique, patented etch and deposition technologies, Tegal's system solutions are backed by over 35 years of advanced development and over 100 patents. Some examples of devices enabled by Tegal technology are energy efficient memories found in portable computers, cellphones, PDAs and RFID (Radio Frequency IDentification) A data collection technology that uses electronic tags for storing data. The tag, also known as an "electronic label," "transponder" or "code plate," is made up of an RFID chip attached to an antenna.  applications; megapixel imaging chips used in digital and cellphone (CELLular telePHONE) The first ubiquitous wireless telephone. Originally analog, all new cellular systems are digital, which has enabled the cellphone to turn into a smartphone that has access to the Internet.  cameras; power amplifiers for portable handsets and wireless networking See wireless network.  gear; and MEMS devices like accelerometers for automotive airbags, microfluidic control devices for ink jet printers; and laboratory-on-a-chip medical test kits.

For more information about Tegal Corporation, visit: www.tegal.com.

About Skyworks Solutions

Skyworks Solutions, Inc. is an innovator of high performance analog and mixed signal semiconductors enabling mobile connectivity. The company's power amplifiers, front-end modules and direct conversion radios are at the heart of many of today's leading-edge multimedia handsets. Leveraging core technologies, Skyworks also offers a diverse portfolio of linear products that support automotive, broadband, cellular infrastructure, industrial and medical applications. Headquartered in Woburn, Mass., Skyworks is worldwide with engineering, manufacturing, sales and service facilities throughout Asia, Europe and North America.

For more information about Skyworks Solutions, visit: www.skyworksinc.com.
COPYRIGHT 2006 Business Wire
No portion of this article can be reproduced without the express written permission from the copyright holder.
Copyright 2006, Gale Group. All rights reserved. Gale Group is a Thomson Corporation Company.

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Publication:Business Wire
Date:Dec 21, 2006
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