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Tegal Receives Endeavor AT PVD Tool Order for RRAM Development; New Non-Volatile Memory Device Based on Low-Temperature Deposition.


PETALUMA, Calif. -- Tegal Corporation (Nasdaq:TGAL TGAL Think Globally, Act Locally
Tgal Thousand gallons
) today announced that a Silicon Valley-based technology company has placed an order for an Endeavor AT(TM) PVD PVD
abbr.
peripheral vascular disease


PVD Peripheral vascular disease, see there
 cluster tool. The Endeavor system will be used in the development of RRAM RRAM Resistive Random Access Memory
RRAM Realtime Reutilization Asset Management
RRAM Redundant Random Access Memory
RRAM Right-hand Rectangular Approximation Method (calculus)
RRAM Rehosted Residual Asset Manager
 (Resistive Random Access Memory This article contains information about scheduled or expected .
It may contain preliminary or speculative information, and may not reflect the final specification of the product.
) devices incorporating certain unique new materials. Low temperature deposition of these materials offers the possibility of fabricating non-volatile, high-density memory cells separately from logic devices for system-on-chip applications.

"We are very excited to be part of this innovative program," said Andy Clarke, Vice President of Tegal Corporation and General Manager of Tegal's PVD Product Group. "RRAM development is a focus for several device manufacturers because of its ideal attributes for high density, low cost and low power consumption. We believe that our customer's low temperature approach is very promising and definitely worthy of our support."

"Tegal is the leading company in plasma etch technology for several types of non-volatile memory devices, such as FeRAM, MRAM (Magnetic RAM) A non-volatile, random access memory technology that is designed to initially replace flash memory and, potentially, DRAM memory. MRAM uses magnetic, thin film elements on a silicon substrate that can be built on the same chip with the logic circuits. , RRAM and polymeric memories," said Thomas Mika, President and CEO (1) (Chief Executive Officer) The highest individual in command of an organization. Typically the president of the company, the CEO reports to the Chairman of the Board.  of Tegal. "This order confirms our commitment to extend our PVD technology into these emerging markets."

The Endeavor AT PVD tool deposits consistent, high purity films with low to zero stress values in an extremely clean process environment. They are widely used in manufacturing advanced power devices, photo masks (including EUV EUV Extreme Ultraviolet
EUV Exclusive Use Vehicle
EUV Extreme Ultra Violet
), light emitting diodes (LED), and backside metallization Met`al`li`za´tion

n. 1. The act or process of metallizing.
 of ultra-thin wafers.

Safe Harbor Statement

Except for historical information, matters discussed in this news release contain forward-looking statements within the meaning of Section 27A of the Securities Act and Section 21E of the Exchange Act. Forward-looking statements, which are based on assumptions and describe our future plans, strategies and expectations, are generally identifiable by the use of the words "anticipate," "believe," "estimate," "expect," "intend," "project" or similar expressions. These forward-looking statements are subject to risks, uncertainties and assumptions about the Company including, but not limited to industry conditions, economic conditions, acceptance of new technologies and market acceptance of the Company's products and services. All forward-looking statements attributable to us or persons acting on our behalf are expressly qualified in their entirety by the cautionary statements in this paragraph. For a further discussion of these risks and uncertainties, please refer to the Company's periodic filings with the Securities and Exchange Commission.

About Tegal

Tegal provides process and equipment solutions to leading edge suppliers of advanced semiconductor and nanotechnology devices. Incorporating unique, patented etch and deposition technologies, Tegal's system solutions are backed by over 35 years of advanced development and over 100 patents. Some examples of devices enabled by Tegal technology are energy efficient memories found in portable computers, cellphones, PDAs and RFID (Radio Frequency IDentification) A data collection technology that uses electronic tags for storing data. The tag, also known as an "electronic label," "transponder" or "code plate," is made up of an RFID chip attached to an antenna.  applications; megapixel imaging chips used in digital and cellphone cameras; power amplifiers for portable handsets and wireless networking gear; and MEMS (MicroElectroMechanical Systems) Tiny mechanical devices that are built onto semiconductor chips and are measured in micrometers. In the research labs since the 1980s, MEMS devices began to materialize as commercial products in the mid-1990s.  devices like accelerometers for automotive airbags, microfluidic control devices for ink jet printers; and laboratory-on-a-chip medical test kits.

More information is available on the Internet at: www.tegal.com.
COPYRIGHT 2005 Business Wire
No portion of this article can be reproduced without the express written permission from the copyright holder.
Copyright 2005, Gale Group. All rights reserved. Gale Group is a Thomson Corporation Company.

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Publication:Business Wire
Geographic Code:1USA
Date:Mar 31, 2005
Words:486
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