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Tegal Receives Advanced Etch Tool Order for RRAM Development.


PETALUMA, Calif. -- Tegal Corporation (Nasdaq:TGAL TGAL Think Globally, Act Locally
Tgal Thousand gallons
) today announced that a US-based technology company has placed an order for 6540 advanced etch system for the development of RRAM RRAM Resistive Random Access Memory
RRAM Realtime Reutilization Asset Management
RRAM Redundant Random Access Memory
RRAM Right-hand Rectangular Approximation Method (calculus)
RRAM Rehosted Residual Asset Manager
 (Resistive Random Access Memory This article contains information about scheduled or expected .
It may contain preliminary or speculative information, and may not reflect the final specification of the product.
) devices incorporating certain unique new materials. The recertified 6540 advanced etch system is valued at over $1.5 million and will be delivered to the customer this month.

The development program is aimed at producing non-volatile, high-density memory cells separately from logic devices for system-on-chip applications. RRAM development is a focus for several device manufacturers because of its ideal attributes for high density, low cost and low power consumption.

"Tegal is the leading company in plasma etch technology for several types of non-volatile memory devices, such as FeRAM, MRAM (Magnetic RAM) A non-volatile, random access memory technology that is designed to initially replace flash memory and, potentially, DRAM memory. MRAM uses magnetic, thin film elements on a silicon substrate that can be built on the same chip with the logic circuits. , RRAM and polymeric memories," said Murali Narasimhan, Tegal's recently appointed Vice President of Marketing. "We announced an order earlier this year for an Endeavor PVD PVD
abbr.
peripheral vascular disease


PVD Peripheral vascular disease, see there
 system which was delivered to another company pursuing RRAM development. Tegal is uniquely positioned to provide both etch and deposition solutions in this emerging market."

The Tegal 6540 used in this application features the unique dual-frequency Hre- etch process module upgraded with a high temperature ESC See escape character and escape key. See also ESC/P.

ESC - escape
 capable of processing at wafer temperatures as high as 500C. This extended temperature range enhances the removal of hard-to-etch metals and metal oxide films without re-deposition on the surface of the device.

Safe Harbor Statement

Except for historical information, matters discussed in this news release contain forward-looking statements within the meaning of Section 27A of the Securities Act and Section 21E of the Exchange Act. Forward-looking statements, which are based on assumptions and describe our future plans, strategies and expectations, are generally identifiable by the use of the words "anticipate," "believe," "estimate," "expect," "intend," "project" or similar expressions. These forward-looking statements are subject to risks, uncertainties and assumptions about the Company including, but not limited to industry conditions, economic conditions, acceptance of new technologies and market acceptance of the Company's products and services. All forward-looking statements attributable to us or persons acting on our behalf are expressly qualified in their entirety by the cautionary statements in this paragraph. For a further discussion of these risks and uncertainties, please refer to the Company's periodic filings with the Securities and Exchange Commission.

About Tegal

Tegal provides process and equipment solutions to leading edge suppliers of advanced semiconductor and nanotechnology devices. Incorporating unique, patented etch and deposition technologies, Tegal's system solutions are backed by over 35 years of advanced development and over 100 patents. Some examples of devices enabled by Tegal technology are energy efficient memories found in portable computers, cellphones, PDAs and RFID (Radio Frequency IDentification) A data collection technology that uses electronic tags for storing data. The tag, also known as an "electronic label," "transponder" or "code plate," is made up of an RFID chip attached to an antenna.  applications; megapixel imaging chips used in digital and cellphone (CELLular telePHONE) The first ubiquitous wireless telephone. Originally analog, all new cellular systems are digital, which has enabled the cellphone to turn into a smartphone that has access to the Internet.  cameras; power amplifiers for portable handsets and wireless networking gear; and MEMS (MicroElectroMechanical Systems) Tiny mechanical devices that are built onto semiconductor chips and are measured in micrometers. In the research labs since the 1980s, MEMS devices began to materialize as commercial products in the mid-1990s.  devices like accelerometers for automotive airbags, microfluidic control devices for ink jet printers; and laboratory-on-a-chip medical test kits.

More information is available on the Internet at: www.tegal.com.
COPYRIGHT 2005 Business Wire
No portion of this article can be reproduced without the express written permission from the copyright holder.
Copyright 2005, Gale Group. All rights reserved. Gale Group is a Thomson Corporation Company.

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Publication:Business Wire
Geographic Code:1USA
Date:Dec 20, 2005
Words:482
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