Tegal Completes ProNova[TM] ICP Process Suite Rollout for Silicon DRIE.Full Complement of High-Value MEMS (MicroElectroMechanical Systems) Tiny mechanical devices that are built onto semiconductor chips and are measured in micrometers. In the research labs since the 1980s, MEMS devices began to materialize as commercial products in the mid-1990s. and 3D IC Process Applications Now Available for Demonstration on the ProNova ICP (1) (Internet Cache Protocol) A protocol used by one proxy server to query another for a cached Web page without having to go to the Internet to retrieve it. See CARP and proxy server. Source PETALUMA, Calif. -- Tegal Corporation, (Nasdaq:TGAL TGAL Think Globally, Act Locally Tgal Thousand gallons ) an innovator of specialized production solutions for the fabrication fabrication (fab´rikā´sh  n),n the construction or making of a restoration. of advanced MEMS, power ICs and optoelectronic devices, today announced that its full process portfolio for silicon DRIE v. t. 1. To endure. So causeless such drede for to drie. - Chaucer. applications has been made available for the new ProNova ICP source. The application suite includes industry-leading processes for high aspect ratio DRIE under the SHARP patent, as well as well-established processes for integrated mask open and the tri-pulse process for high resist mask selectivity deep silicon etching. A key challenge for 200mm MEMS fabrication is porting established MEMS processes onto 200mm tools and then improving on the baseline process results; for silicon DRIE, these challenges include achieving higher etch To create a design in a material by digging out the material. The circuit designs on printed circuit boards and chips are etched by acid. See chip and printed circuit board. rates, tighter control of tilt angles and etch profiles across 200mm wafers, and tighter control of etch depth uniformity across 200mm wafers The ProNova ICP process suite now helps solve these challenges. "Providing our customers with high-value DRIE process solutions is at the core of our business model," said John Almerico, Senior Marketing Director for Etch Products at Tegal. "Transferring our advanced applications for silicon DRIE to 200mm wafers using the ProNova ICP source successfully completes the launch of this new process module for MEMS and 3D-IC customers worldwide." The ProNova ICP source is available immediately to ship on Tegal 110, 200, 3200, and 4200 DRIE Wafer Processing Systems. ProNova is also compatible as a retrofit with Tegal and AMMS AMMS Automated Maintenance Management System AMMS Australian Microscopy and Microanalysis Society AMMS Advanced Microwave Moisture Sounder AMMS Asthma Management Model System AMMS Advanced Materials Management System AMMS Acquisition Milestone Management System DRIE systems already in the field, and ProNova supports SHARP - Tegal's Super High Aspect Ratio Process, achieving etched feature aspect ratios of greater than 100:1 in production environments. In addition, all Tegal silicon DRIE systems now feature low frequency bias for notch-free silicon DRIE for SOI (Silicon On Insulator) A chip architecture that increases transistor switching speed by reducing capacitance (build-up of electrical charges in the transistor's elements), and thus reducing the discharge time. The power requirement is also reduced in some designs. substrates as standard equipment. Customers interested in submitting samples to evaluate the ProNova ICP source should contact their local Tegal sales office or sales representative. Tegal is a participating sponsor of the MEMS Executive Congress this week in Sonoma, California Sonoma is a historically significant town in Sonoma Valley, Sonoma County, California, USA. Sonoma is centered around its historic town plaza, a remnant of the town's Spanish colonial past. . Paul Werbaneth, Tegal Vice President of Marketing and Applications, will be moderating a panel discussion titled "Energy/Environmental Sensing and Green MEMS." More information about the MEMS Executive Congress is available at www.memscongress.com. Safe Harbor Safe Harbor 1. A legal provision to reduce or eliminate liability as long as good faith is demonstrated. 2. A form of shark repellent implemented by a target company acquiring a business that is so poorly regulated that the target itself is less attractive. Statement Except for historical information, matters discussed in this news release contain forward-looking statements within the meaning of Section 27A of the Securities Act and Section 21E of the Exchange Act. Forward-looking statements, which are based on assumptions and describe our future plans, strategies and expectations, are generally identifiable by the use of the words "anticipate," "believe," "estimate," "expect," "intend," "project" or similar expressions. These forward-looking statements are subject to risks, uncertainties and assumptions about the Company including, but not limited to industry conditions, economic conditions, acceptance of new technologies and market acceptance of the Company's products and services. All forward-looking statements attributable to us or persons acting on our behalf are expressly qualified in their entirety by the cautionary statements in this paragraph. For a further discussion of these risks and uncertainties, please refer to the Company's periodic filings with the Securities and Exchange Commission. About Tegal Corporation Tegal is an innovator of specialized production solutions for the fabrication of advanced MEMS, power ICs and optoelectronic devices found in products like smart phones, networking gear, solid-state lighting Solid state lighting (SSL) refers to a type of lighting that utilizes light-emitting diodes (LEDs), organic light-emitting diodes (OLED), or polymer light-emitting diodes (PLED) as sources of illumination rather than electrical filaments or gas. , and digital imaging. The Company's plasma etch and deposition tools enable sophisticated manufacturing techniques, such as 3D interconnect structures formed by intricate silicon etch, also known as Deep Reactive Ion Etching (DRIE). Tegal combines proven expertise with practical system strategies to deliver application-specific solutions that are robust and reliable, and deliver exceptional process quality and high yields at a lower overall cost of ownership. Headquartered in Petaluma, California Petaluma is a city in Sonoma County, California, in the United States. As of the 2000 census, the city had a total population of 54,538. As of 2005, Petaluma's population is 56,721. [link was dead) contains the Rancho Petaluma Adobe, a National Historic Landmark. , the company has more than 35 years of expertise and innovation in specialized technologies, over 100 patents, and an installed base of more than 1900 systems worldwide. Please visit us on the web at www.tegal.com. |
|
||||||||||||||||
Printer friendly
Cite/link
Email
Feedback
Reader Opinion