Tanner Labs Now Offers Scanning Electron Micrograph (SEM) Services in Its MEMS R&D and Fabrication Facility.Tool Helps Increase Manufacturing Yield of Micro-Electro-Mechanical Systems Micro-electro-mechanical systems (MEMS) Systems that couple micromechanisms with microelectronics. Such systems are also referred to as microsystems, and the coupling of micromechanisms with microelectronics is also termed micromechatronics. (MEMS (MicroElectroMechanical Systems) Tiny mechanical devices that are built onto semiconductor chips and are measured in micrometers. In the research labs since the 1980s, MEMS devices began to materialize as commercial products in the mid-1990s. ) by as Much as 50 Percent PASADENA, Calif. -- Tanner The code name for the Xeon version of the Pentium III chip. See Xeon. Labs, a division of Tanner Research, today said it will begin offering scanning electron micrograph electron micrograph n. A micrograph made by an electron microscope. (SEM) services in its MEMS R&D and Fabrication fabrication (fab´rikā´sh  n),n the construction or making of a restoration. Facility in Pasadena. Tanner has used the SEM system internally but is now offering it externally. MEMS, or micro-electro-mechanical devices, integrate traditional microelectronics, or silicon-based devices, with mechanical elements, sensors and actuators to create chips that have not just computational capabilities but can sense and control. MEMS devices are used in a variety of applications including biotechnology, communications, accelerometers for crash testing and many others that require analysis and control. The SEM services from Tanner Labs rapidly image and critical process steps on wafer lots, which helps improve the numbers of usable devices made by as much as 50 percent. Imaging of thin films and structures during processing enables subsequent process steps to be optimized for maximizing device yield. The SEM device, a Cambridge Stereoscan 240, can load sample sizes as large as four inches with resolution of 10 nanometers. This resolution limit is useful for examining nano-structures with sub-micron features. Other key features of the SEM system include: * Acceleration voltage of 0.3kV to 30kV enabling examination of uncoated or delicate specimens, which are sensitive to electron bombardment * Magnification Magnification A measure of the effectiveness of an optical system in enlarging or reducing an image. For an optical system that forms a real image, such a measure is the lateral magnification m between 5 and 300,000 times of actual features * Chamber capacity of 200 mm diameter devices, enabling monitoring large device arrays without destructive dicing dicing Trauma surgery Multiple 0.5-1.0 cm, cube-like lacerations of the skin seen in MVA victims who strike shattered tempered glass car windows or cleaving Tanner Research, Inc. Founded in 1988, Tanner Research, Inc. is a privately held company privately held company A firm whose shares are held within a relatively small circle of owners and are not traded publicly. headquartered in Monrovia, CA. Tanner Research, through its MEMS R&D and Fabrication Facility supports advanced research and development. The facility provides more than 1,000 square feet of dedicated Class 1000 and Class 100 cleanroom space and enables the development and low-volume manufacturing of MEMS using traditional silicon-based processes, as well as innovative and non-traditional, low-temperature (<250ae C) materials and processes. Manufacturing examples include gyroscopes, ink jet See inkjet printer. devices, micro thrusters, and other microfluidic devices. Tanner Research MEMS R&D and Fabrication Facility services include: * Research and development partnerships: direct access to the Tanner MEMS staff and cleanroom facility for qualified customers with in-house MEMS design and processing expertise. * Full-service MEMS research and development: highly effective MEMS and microelectronics technology, product, and fabrication process research and development. * Prototype and pilot line MEMS fabrication (low-volume "foundry" services): prototype and low volume initial production for mature MEMS designs. For more information about Tanner Research, Inc., please visit www.tanner.com or call 626-471-9700. All brands and trademarks are the property of their respective owners. |
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