TU Berlin Receives Unaxis DSE System for MEMS.Business Editors/High-Tech Writers ST. PETERSBURG, Fla.--(BUSINESS WIRE)--Jan. 19, 2004 Unaxis Semiconductors has delivered a system to the Microsensor Microsensor A very small sensor with physical dimensions in the submicrometer to millimeter range. A sensor is a device that converts a nonelectrical physical or chemical quantity, such as pressure, acceleration, temperature, or gas concentration, into an and Actuator Technology Center (MAT) at the Technical University of Berlin, Germany for use in their silicon microsystems program. The system, with its deep silicon etching (DSE 1. DSE - Display Screen Equipment. See Visual Display Unit. 2. DSE - Data Structure Editor. (TM)) capabilities, will be used to advance research and development efforts, most notably of new microsensors and microactuators, and provide device prototyping. Continued collaboration between the two partners will promote the joint goals of education, innovation, and technology. The new addition will provide the University's fabrication facility with sophisticated technology that will support local industry in developing new MEMS devices and applications. Professor Ernst Obermeier, Director of the MAT states, "We are looking forward to utilizing the Unaxis system to etch complex structures and to shorten the time from concept to working device." Dr. David Lishan, Technical Marketing Manager in the Unaxis Etch Strategic Business Unit points out, "Universities, such as the Technical University of Berlin are critical in developing and transferring MEMS from R&D to successful production." Close partnerships between leading equipment vendors and technology innovators will produce the combination necessary to enable the future of MEMS. About Unaxis Semiconductors Unaxis Semiconductors is a Division of Unaxis, a leading global provider of integrated manufacturing systems and services for Information Technology markets, such as semiconductors, data storage, flat panel displays, optical components, and selected non-IT markets. Unaxis Semiconductors offers a comprehensive range of innovative thin film production solutions for the Advanced Silicon (Si and SiGe applications as well as supporting technologies like Photomask), Advanced Packaging (all thin film wafer level packaging technologies) and Compound Semi & Microtechnology (MEMS, high frequency, optical and non-silicon based technologies) markets. Process technologies include PVD PVD abbr. peripheral vascular disease PVD Peripheral vascular disease, see there , PECVD PECVD Plasma-Enhanced Chemical Vapor Deposition , UHV-CVD UHV-CVD Ultra-High Vacuum Chemical Vapor Deposition , LEPC, LEPECVD LEPECVD Low Energy Plasma Enhanced Chemical Vapor Deposition , etching (RIE, ICP (1) (Internet Cache Protocol) A protocol used by one proxy server to query another for a cached Web page without having to go to the Internet to retrieve it. See CARP and proxy server. ) and RTP. Global Support is provided through two technology centers and over 40 sales, service and spare parts centers. http://www.semiconductors.unaxis.com |
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