TRW, CHIP MAKERS EXPAND COMMITMENT FOR PRODUCING LIGHT SOURCES FOR NEXT-GEN CHIP-MAKING EQUIPMENT.

TRW (NYSE:TRW) and the Extreme Ultraviolet Limited Liability Company (EUV LLC), a consortium of semiconductor chip makers, have expanded the scope of a joint development agreement to develop and produce laser-based light sources for the next-generation chip-making process called extreme ultraviolet (EUV) lithography. The new EUV light source enables chip makers to continue increasing the speed of advanced chips for over 10 years.

Under the expanded agreement, TRW and the EUV LLC are making investments that will allow TRW to accelerate the development of laser and related technologies required to make light sources available to lithography equipment manufacturers in 2003. The expanded agreement also provides for development of EUV light sources with higher powers, increased efficiencies and higher throughput.

"With this agreement, TRW has once again demonstrated its commitment to meeting the needs of the semiconductor industry and is moving forward at the pace needed to support our schedule for introducing EUV lithography tools," said Chuck Gwyn, program manager, EUV LLC.

"Since 1997, TRW has invested significant technical and capital resources to ensure EUV light sources will be available to semiconductor equipment manufacturers before chip makers reach the optical limits of existing light source technology," said Tom Romesser, vice president and general manager, TRW Space & Technology Division. "We've developed kilowatt-class lasers and the conversion technology required to create EUV light. We've successfully demonstrated the feasibility of a high-power, laser-based EUV light source meeting our customers' needs. We've also ensured our ability to cost-effectively supply EUV light sources to the semiconductor industry by acquiring Cutting Edge Optronics, a solid state laser and laser diode company."

According to Romesser, Cutting Edge, a wholly-owned subsidiary acquired by TRW in October 2000, will lead the development and volume production of TRW's EUV light sources. To meet the demand for EUV light sources and other products, TRW is doubling the capacity of Cutting Edge's laser manufacturing facilities.