TEL to Launch Impressio, FPD Plasma Etch/Ash System for 7th Generation Substrates.Business Editors/High-Tech Writers TOKYO--(BUSINESS WIRE)--April 6, 2004 Tokyo Electron Limited (TEL TEL Telephone TEL Telegram TEL Telugu (langauge) TEL Terrorist Exclusion List TEL Technology-Enhanced Learning TEL Transporter-Erector-Launcher TEL Tetra-Ethyl Lead TEL Team Deutsche Telekom ) announced Tuesday that it will begin shipments in summer 2004 of the Impressio(tm), its new FPD (1) (Flat Panel Display) See LCD, plasma display, EL display, FED and flat panel display. (2) (Field Programmable Device) An umbrella term for all chips that can be programmed by the customer including SPLDs, CPLDs and FPGAs. See PLD. plasma etch/ash system capable of handling 7th generation substrates used in the production process of flat panel displays A thin display screen for computer and TV usage. The first flat panels appeared on laptop computers in the mid-1980s, and the LCD technology became the standard. Stand-alone LCD screens became available for desktop computers in the mid-1990s and exceeded sales of CRTs for the first time (FPD). At present, the FPD market is seeing an increase in the production of LCDs for notebook PCs and PC monitors, as well as a growing need for larger glass substrates for LCD televisions. This has resulted in the necessity for mass production of 7th generation substrates measuring 1,870mm by 2,200mm. In plasma etching Plasma etching is a form of plasma processing in which a high-speed stream of plasma is shot (in pulses) at a sample. The atoms of the shot element embed themselves at or just below the surface of the target. The physical properties of the target are modified in the process. , handling huge substrates measuring more than 2m on one side presents a challenge of maintaining the etching etching, the art of engraving with acid on metal; also the print taken from the metal plate so engraved. In hard-ground etching the plate, usually of copper or zinc, is given a thin coating or ground of acid-resistant resin. rate and uniformity at proper levels. The Impressio is designed and developed to create a uniform plasma density in process chambers and to increase the efficiency of etching. In addition to supplying process gases at a high flow rate, the new product provides six turbo molecular pumps assigned to each chamber as a standard feature, which makes large flow pumping possible. Impressio's structure emphasizes reliability, with throughput equivalent to the 5th or 6th generation systems, as well as optimization of the transfer position for supporting substrates via simulations to minimize bending occurring on glass substrates with a size larger than 2m. TEL has delivered more than 200 5th and 6th generation FPD plasma etch/ash system chambers. By making effective use of the experience of these predecessors, the new 7th generation system has achieved high-quality and high reliability. Impressio is a trademark of Tokyo Electron Limited in Japan, Korea and Taiwan. About TEL TEL (Head Office: Minato-ku, Tokyo; President & CEO (1) (Chief Executive Officer) The highest individual in command of an organization. Typically the president of the company, the CEO reports to the Chairman of the Board. : Kiyoshi Sato) established in 1963, is a leading supplier of innovative semiconductor and FPD production equipment worldwide. In Japan, TEL also distributes computer network related products and electronic components of global leading suppliers. To support this diverse product base, TEL has strategically located around the world. TEL is a publicly held company listed on the Tokyo Stock Exchange Tokyo Stock Exchange Main stock market of Japan, located in Tokyo. It opened in 1878 to provide a market for the trading of government bonds newly issued to former samurai. . http://www.tel.com |
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